Konzeption, Entwicklung und Prozessierung nanoskaliger Dünnschichtverbunde mit integrierter Sensor- und Aktorfunktion

This thesis introduces nanometer scaled thin film compounds with integrated sensor and shape memory actor function. The aim is to build up demonstrators with lateral substrate dimensions of a few millimeters which can be individually deflected while generating derived real time signals depending on the degree of the compound's deflection. This material compound can be integrated in a fluidic module as arrays of micro valves to control fluidic streams.