%PDF-1.6
%âãÏÓ
2140 0 obj
<>]>>
endobj
112 0 obj
<>
endobj
3061 0 obj
<>/glo:symb:Omega<>/cite.He1992<>/appendix*.37<>/cite.Koutsospyros2004<>/appendix*.39<>/table.4.1<>/table.4.2<>/table.4.3<>/table.4.4<>/table.4.5<>/table.4.6<>/table.4.7<>/cite.Mitura1991<>/appendix*.40<>/cite.Meakin1986<>/glo:symb:eta<>/glo:acr:KS<>/cite.Doremus2002<>/figure.4.1<>/figure.4.2<>/cite.Bubenzer1983<>/figure.4.3<>/cite.Meakin1992<>/glo:symb:bomega<>/figure.4.4<>/cite.Kushner1985<>/figure.4.5<>/cite.Casiraghi2005<>/figure.4.6<>/figure.4.7<>/figure.4.8<>/cite.Heisen1958<>/figure.4.9<>/cite.Hastings1970<>/cite.Kahn1953<>/subfigure.4.32.1<>/subfigure.4.32.2<>/subfigure.4.32.3<>/subfigure.4.32.4<>/subfigure.4.32.5<>/cite.Moorey1994<>/subfigure.4.32.6<>/cite.Koidl1989<>/cite.Brenner1990<>/glo:acr:MH<>/glo:symb:nphi<>/cite.Bogaerts1995<>/subfigure.B.13.1<>/subfigure.B.13.2<>/subfigure.B.13.3<>/subfigure.B.13.4<>/subfigure.B.13.5<>/subfigure.B.13.6<>/subfigure.B.10.1<>/subfigure.B.10.2<>/cite.Yao1992<>/glo:acr:DLA<>/subfigure.B.10.3<>/cite.Yao1993<>/subfigure.B.10.4<>/cite.Yu2002<>/glo:acr:DLC<>/cite.Hopf1999<>/subfigure.B.10.5<>/subfigure.B.10.6<>/cite.Kuramoto1976<>/cite.Nakamura2005<>/cite.Oliveira2006<>/cite.Jansen1985<>/equation.A.1<>/cite.Fichthorn1991<>/equation.A.2<>/equation.A.3<>/cite.Bergen1988<>/equation.A.4<>/equation.A.5<>/equation.A.6<>/equation.A.7<>/equation.A.8<>/equation.A.9<>/cite.Zhao1999<>/cite.Metropolis1949<>/cite.Giacometti2001<>/cite.Turkin2010<>/cite.Bak1987<>/cite.Matsumoto1998<>/subsection.5.3.1<>/subsection.5.3.2<>/subsection.5.3.3<>/subsection.5.3.4<>/cite.Pelliccione2006<>/subsection.5.3.5<>/section.5.1<>/equation.5.1<>/subsection.5.3.6<>/section.5.2<>/section.5.3<>/subfigure.4.21.1<>/subfigure.4.21.2<>/cite.Kahanda1992<>/cite.Kanazawa1988<>/subfigure.4.21.3<>/equation.2.1<>/section.2.1<>/equation.2.2<>/section.2.2<>/equation.2.3<>/section.2.3<>/equation.2.4<>/section.2.4<>/cite.Matheron2002<>/equation.2.5<>/section.2.5<>/equation.2.6<>/section.2.6<>/cite.Ueno2005<>/equation.2.7<>/equation.2.8<>/equation.2.9<>/glo:acr:aCH<>/cite.Bales1989a<>/glo:symb:theta<>/cite.Hopf2000<>/glo:acr:RD<>/cite.Wolf1990<>/glo:acr:PECVD<>/glo:symb:beta<>/cite.Ohana2004<>/cite.IslamRaja1991<>/subfigure.B.9.1<>/subfigure.B.9.2<>/subfigure.B.9.3<>/subfigure.B.9.4<>/subfigure.B.9.5<>/subfigure.B.9.6<>/cite.Zhao2000<>/subfigure.B.6.1<>/subfigure.B.6.2<>/subfigure.B.6.3<>/subfigure.B.6.4<>/section*.3<>/section*.4<>/cite.Joag1987<>/section*.5<>/section*.6<>/section*.7<>/subfigure.B.3.1<>/cite.DeBonet1997<>/section*.8<>/subfigure.B.3.2<>/section*.9<>/subfigure.B.3.3<>/subfigure.B.3.4<>/cite.Bray2001<>/cite.Deutsch1978<>/cite.Knight1991<>/cite.Logothetidis1996<>/subfigure.4.13.1<>/subfigure.4.13.2<>/subsection.4.1.1<>/subsection.4.1.2<>/subsection.4.1.3<>/subsection.4.1.4<>/subsection.4.1.5<>/cite.Richardson1910<>/glo:acr:PVD<>/cite.Mullins1957<>/cite.Mullins1959<>/cite.Plimpton1995a<>/chapter.1<>/chapter.2<>/chapter.3<>/subfigure.4.42.1<>/cite.Bellac1995<>/chapter.4<>/subfigure.4.42.2<>/chapter.5<>/chapter.6<>/chapter.7<>/cite.Mullins1963<>/cite.Mullins1964<>/cite.Family1985<>/cite.Family1986<>/cite.Eluere1991<>/table.B.1<>/cite.Stein1961<>/table.B.2<>/cite.Villarrubia1996<>/cite.Villarrubia1997<>/cite.Libbrecht2005<>/cite.Bales1990<>/subfigure.3.7.1<>/cite.Mayr1999<>/cite.Pinches1991<>/cite.Bales1991<>/subfigure.3.7.2<>/subfigure.3.4.1<>/subfigure.3.4.2<>/subfigure.3.4.3<>/subsection.3.5.1<>/subsection.3.5.2<>/Hfootnote.10<>/subsection.3.5.3<>/subsection.3.5.4<>/subsection.3.5.5<>/figure.3.10<>/figure.3.11<>/figure.3.12<>/figure.B.1<>/figure.3.13<>/figure.B.2<>/figure.B.3<>/glo:symb:dt<>/figure.B.4<>/figure.B.5<>/figure.B.6<>/figure.B.7<>/figure.B.8<>/figure.B.9<>/cite.Raible2000<>/cite.Raible2001<>/cite.Lee1994<>/glo:symb:alpha<>/cite.Bilkadi1984<>/cite.Dalakos2005<>/cite.Rubio2003<>/cite.Grinfeld1993<>/cite.Buijnsters2008<>/cite.Collins1994<>/cite.Roedelsperger1974<>/cite.Kline1989<>/glo:symb:fc<>/subfigure.4.37.1<>/subfigure.4.37.2<>/subfigure.4.37.3<>/subfigure.4.37.4<>/glo:symb:R_KBR<>/subfigure.4.37.5<>/subfigure.4.37.6<>/glo:symb:fo<>/subfigure.4.34.1<>/glo:symb:fu<>/subfigure.4.34.2<>/subfigure.4.34.3<>/subfigure.4.34.4<>/figure.3.1<>/subfigure.4.34.5<>/figure.3.2<>/subfigure.4.34.6<>/figure.3.3<>/figure.3.4<>/figure.3.5<>/figure.3.6<>/figure.3.7<>/figure.3.8<>/cite.Edwards1982<>/figure.3.9<>/subfigure.4.31.1<>/subfigure.4.31.2<>/subfigure.4.31.3<>/cite.Mayr2001<>/cite.Ault1956<>/subfigure.4.31.4<>/subfigure.4.31.5<>/subfigure.4.31.6<>/cite.Barabasi<>/cite.Peltenburg1971<>/cite.Aisenberg1971<>/cite.Peng1998a<>/page.10<>/page.11<>/page.12<>/page.13<>/page.14<>/page.15<>/page.16<>/cite.Anderson1983<>/page.17<>/page.18<>/cite.Reinberg1979<>/page.19<>/cite.Thompson1988<>/glo:symb:ha<>/cite.Reinker1997<>/cite.Antal1996<>/page.20<>/page.21<>/page.22<>/page.23<>/cite.Rollefson1990<>/page.24<>/page.25<>/cite.Robertson1992<>/page.26<>/page.27<>/cite.Lee2008<>/subfigure.B.12.1<>/page.28<>/subfigure.B.12.2<>/page.29<>/subfigure.B.12.3<>/subfigure.B.12.4<>/subfigure.B.12.5<>/subfigure.B.12.6<>/subsection.2.3.1<>/cite.Majaniemi1996<>/subsection.2.3.2<>/subsection.2.3.3<>/subsection.2.3.4<>/cite.McKay1973<>/subsection.2.3.5<>/cite.Mandelbrot1963<>/subsection.2.3.6<>/cite.Herring1950<>/cite.Mandelbrot1965<>/page.30<>/cite.Mandelbrot1967<>/page.31<>/page.32<>/page.33<>/page.34<>/page.35<>/page.36<>/cite.Trivedi2001<>/page.37<>/page.38<>/page.39<>/cite.Cote1999<>/cite.Witten1981<>/cite.Allen1987<>/cite.Krug1989<>/page.40<>/page.41<>/cite.Matsushita1984<>/page.42<>/page.43<>/page.44<>/page.45<>/cite.Goodman1960<>/page.46<>/page.47<>/page.48<>/page.49<>/cite.Harlin2006<>/subfigure.4.26.1<>/subfigure.4.26.2<>/cite.Sneppen1992<>/subfigure.4.26.3<>/subfigure.4.26.4<>/cite.Julesz1984<>/cite.Kertesz1986<>/subfigure.4.23.1<>/subfigure.4.23.2<>/subfigure.4.23.3<>/subfigure.4.23.4<>/subfigure.4.23.5<>/page.50<>/subfigure.4.23.6<>/page.51<>/page.52<>/equation.4.1<>/section.4.1<>/page.53<>/section.4.2<>/page.54<>/page.55<>/page.56<>/Item.10<>/page.57<>/page.58<>/page.59<>/cite.Cuerno2004<>/cite.Robertson2002<>/page.60<>/cite.Robertson2005<>/page.61<>/page.62<>/page.63<>/page.64<>/page.65<>/equation.2.12<>/page.66<>/equation.2.13<>/cite.Jiang1989<>/page.67<>/equation.2.14<>/page.68<>/equation.2.15<>/page.69<>/equation.2.16<>/cite.Heideman1984<>/equation.2.17<>/equation.2.18<>/equation.2.19<>/cite.Uhlmann1998<>/Doc-Start<>/page.70<>/page.71<>/page.72<>/page.73<>/equation.2.20<>/page.74<>/equation.2.21<>/subfigure.B.8.1<>/page.75<>/equation.2.22<>/subfigure.B.8.2<>/cite.Peng1998<>/page.76<>/equation.2.23<>/subfigure.B.8.3<>/page.77<>/subfigure.B.8.4<>/page.78<>/page.79<>/cite.Murakami2010<>/cite.Rapaport1996<>/subfigure.B.5.1<>/subfigure.B.5.2<>/subfigure.B.5.3<>/subfigure.B.5.4<>/page.80<>/subfigure.B.2.1<>/page.81<>/subfigure.B.2.2<>/glo:symb:nu<>/page.82<>/subfigure.B.2.3<>/page.83<>/subfigure.B.2.4<>/page.84<>/subfigure.B.2.5<>/page.85<>/page.86<>/glo:acr:KBR<>/page.87<>/page.88<>/page.89<>/cite.Tanenbaum1997<>/cite.Jones1953<>/cite.Kim2003<>/cite.Gallego2007<>/cite.Harris1997<>/subfigure.4.18.1<>/subfigure.4.18.2<>/subfigure.4.18.3<>/subfigure.4.18.4<>/subfigure.4.18.5<>/subfigure.4.18.6<>/cite.Karunasiri1989<>/page.90<>/page.91<>/page.92<>/page.93<>/page.94<>/page.95<>/cite.Wu1999<>/page.96<>/page.97<>/subfigure.4.2.1<>/subfigure.4.15.1<>/page.98<>/subfigure.4.2.2<>/subfigure.4.15.2<>/page.99<>/cite.Buckwar2007<>/subfigure.4.2.3<>/subfigure.4.15.3<>/page.100<>/figure.4.10<>/subfigure.4.2.4<>/page.101<>/figure.4.11<>/subfigure.4.2.5<>/page.102<>/figure.4.12<>/subfigure.4.2.6<>/page.103<>/figure.4.13<>/page.104<>/figure.4.14<>/page.105<>/figure.4.15<>/page.106<>/figure.4.16<>/page.107<>/figure.4.17<>/page.108<>/figure.4.18<>/page.109<>/figure.4.19<>/subfigure.4.12.1<>/subfigure.4.12.2<>/cite.Karabacak2002<>/cite.Karabacak2009<>/page.110<>/figure.4.20<>/page.111<>/figure.4.21<>/cite.Manenschijn1991<>/page.112<>/figure.4.22<>/page.113<>/figure.4.23<>/page.114<>/figure.4.24<>/page.115<>/figure.4.25<>/page.116<>/figure.4.26<>/page.117<>/figure.4.27<>/page.118<>/figure.4.28<>/page.119<>/figure.4.29<>/cite.Biederman2000<>/glo:symb:kappa<>/cite.Rapaport2006<>/page.120<>/figure.4.30<>/page.121<>/figure.4.31<>/page.122<>/figure.4.32<>/page.123<>/figure.4.33<>/page.124<>/figure.4.34<>/page.125<>/figure.4.35<>/page.126<>/glo:symb:rc<>/figure.4.36<>/page.127<>/figure.4.37<>/section*.10<>/page.128<>/figure.4.38<>/section*.11<>/page.129<>/figure.4.39<>/section*.12<>/section*.13<>/section*.14<>/section*.15<>/section*.16<>/section*.17<>/section*.18<>/section*.19<>/subfigure.4.41.1<>/subfigure.4.41.2<>/subfigure.4.41.3<>/subfigure.4.41.4<>/subfigure.4.41.5<>/subfigure.4.41.6<>/cite.Kaplan2003<>/page.130<>/figure.4.40<>/page.131<>/cite.Koenig1951<>/figure.4.41<>/page.132<>/figure.4.42<>/page.133<>/page.134<>/page.135<>/page.136<>/cite.Bickley1948<>/page.137<>/section*.20<>/page.138<>/section*.21<>/page.139<>/section*.22<>/section*.23<>/section*.24<>/section*.25<>/section*.26<>/section*.27<>/section*.28<>/cite.Schmellenmeier1955<>/section*.29<>/cite.Molchanov1999<>/glo:acr:CVD<>/cite.Umbach2001<>/cite.Bondi1964<>/appendix.A<>/appendix.B<>/page.140<>/page.141<>/page.142<>/page.143<>/page.144<>/page.145<>/page.146<>/page.147<>/section*.30<>/page.148<>/section*.31<>/page.149<>/section*.32<>/section*.33<>/section*.34<>/section*.35<>/section*.36<>/subfigure.3.3.1<>/subfigure.3.3.2<>/section*.38<>/subsection.3.4.1<>/subsection.3.4.2<>/subsection.3.4.3<>/subsection.3.4.4<>/cite.Alder1959<>/figure.A.1<>/figure.A.2<>/page.150<>/cite.Koenig1970<>/page.151<>/page.152<>/page.153<>/cite.Cooley1965<>/page.154<>/page.155<>/page.156<>/page.157<>/page.158<>/page.159<>/cite.Butler1963<>/cite.Westwood1976<>/cite.Beeler1966<>/cite.Chapman<>/page.160<>/page.161<>/page.162<>/cite.Binnig1982<>/cite.Binnig1986<>/cite.Box1958<>/glo:symb:C<>/cite.Halton1960<>/cite.Plischke1987<>/glo:symb:H<>/Item.1<>/Item.2<>/glo:symb:L<>/Item.3<>/subfigure.4.36.1<>/Item.4<>/glo:symb:N<>/subfigure.4.36.2<>/Item.5<>/cite.Srolovitz1989<>/subfigure.4.36.3<>/Item.6<>/cite.Boyer1988<>/glo:symb:P<>/subfigure.4.36.4<>/Item.7<>/figure.5.1<>/cite.Blocher1974<>/subfigure.4.36.5<>/Item.8<>/figure.5.2<>/glo:symb:R<>/subfigure.4.36.6<>/Item.9<>/figure.5.3<>/glo:symb:S<>/cite.Goral1984<>/glo:symb:V<>/subfigure.4.33.1<>/subfigure.4.33.2<>/subfigure.4.33.3<>/subfigure.4.33.4<>/figure.2.1<>/cite.Erdemir2000<>/subfigure.4.33.5<>/figure.2.2<>/subfigure.4.33.6<>/figure.2.3<>/figure.2.4<>/cite.Bradley1988<>/figure.2.5<>/cite.MunozGarcia2006<>/cite.Bensimon1984<>/glo:symb:d<>/cite.Herrasti1992<>/cite.Lifshitz1990<>/glo:symb:f<>/glo:symb:h<>/cite.Meakin<>/glo:symb:l<>/cite.Hopwood1992<>/glo:symb:n<>/cite.Nadler1984<>/cite.Kessler1985<>/glo:symb:r<>/glo:symb:t<>/cite.Wucher1988<>/glo:symb:w<>/cite.Sivashinsky1977<>/glo:symb:z<>/cite.Letts1981<>/glo:symb:xb<>/equation.3.10<>/equation.3.11<>/equation.3.12<>/equation.3.13<>/equation.3.14<>/equation.3.15<>/glo:symb:xi<>/equation.3.16<>/cite.Thornton1983<>/equation.3.17<>/equation.3.18<>/equation.3.19<>/cite.Locher1991<>/cite.Keller1993<>/cite.Moeller1993<>/cite.Butcher1996<>/subfigure.B.14.1<>/subfigure.B.14.2<>/cite.Moseler1998<>/subfigure.B.14.3<>/cite.Carter1999<>/subfigure.B.14.4<>/cite.Zhou1998<>/subfigure.B.11.1<>/equation.3.20<>/subfigure.B.11.2<>/equation.3.21<>/subfigure.B.11.3<>/equation.3.22<>/subfigure.B.11.4<>/equation.3.23<>/equation.3.24<>/equation.3.25<>/equation.3.26<>/equation.3.27<>/equation.3.28<>/cite.Plimpton1995<>/equation.3.29<>/cite.Sigmund1973<>/cite.Zorba2006<>/section.B.1<>/glo:symb:K1<>/section.B.2<>/glo:symb:K2<>/cite.Burrage1996<>/equation.3.30<>/equation.3.31<>/equation.3.32<>/cite.Sun1989<>/equation.3.33<>/cite.Eckert1962<>/equation.3.34<>/cite.Duerr2003<>/equation.3.35<>/equation.3.36<>/equation.3.37<>/equation.3.38<>/equation.3.39<>/cite.Warren1995<>/cite.Parisi1984<>/cite.Sawada1986<>/cite.Borras2007<>/equation.3.40<>/equation.3.41<>/equation.3.42<>/equation.3.43<>/equation.3.44<>/equation.3.45<>/cite.Amar1992<>/equation.3.46<>/equation.3.47<>/equation.3.48<>/equation.3.49<>/cite.Fedosenko2001<>/cite.Sawada1995<>/cite.Kardar1986<>/cite.Roland1991<>/cite.Haberland1992<>/cite.Neyts2007<>/section.3.1<>/equation.3.1<>/section.3.2<>/equation.3.2<>/section.3.3<>/equation.3.3<>/section.3.4<>/equation.3.4<>/section.3.5<>/equation.3.5<>/equation.3.6<>/equation.3.7<>/equation.3.8<>/equation.3.9<>/cite.Markiewicz1995<>/cite.Moseler2000<>/cite.Shaha2011<>/cite.Moseler2005<>/cite.Singh1993<>/cite.Peter2007<>/cite.Pastewka2008a<>/cite.Kardar1996<>/cite.Rost2000<>/cite.Drotar1999<>/glo:symb:lambda_2<>/glo:acr:KPZ<>/cite.Peter2010<>/cite.Arkel1925<>/glo:symb:zeta<>/subfigure.B.7.1<>/subfigure.B.7.2<>/subfigure.B.7.3<>/subfigure.B.7.4<>/subfigure.B.4.1<>/cite.Dumay2002<>/subfigure.B.4.2<>/cite.Catmull1974<>/subfigure.B.4.3<>/subfigure.B.4.4<>/cite.Sun2000<>/subfigure.B.1.1<>/subfigure.B.1.2<>/subfigure.B.1.3<>/subfigure.B.1.4<>/cite.Drotar2000a<>/figure.B.10<>/glo:symb:Nx<>/cite.Wank2009<>/subfigure.B.1.5<>/figure.B.11<>/figure.B.12<>/figure.B.13<>/figure.B.14<>/cite.Ojeda2000<>/cite.Vasile1977<>/cite.Giada2002<>/cite.Bryant1977<>/cite.Hainsworth2007<>/cite.Camargo2002<>/cite.Meakin1983a<>/cite.Baloniak2008<>/subfigure.4.14.1<>/subfigure.4.14.2<>/cite.Drotar2000<>/cite.Drotar2001<>/subsection.4.2.1<>/glo:symb:Pc<>/subsection.4.2.2<>/cite.Grill1990<>/subsection.4.2.3<>/subsection.4.2.4<>/subsection.4.2.5<>/glo:acr:EW<>/cite.Fourier1822<>/cite.Tsukizoe1977<>/glo:symb:Po<>/glo:symb:R1<>/glo:symb:R2<>/glo:symb:Pt<>/glo:symb:Pu<>/Hfootnote.1<>/Hfootnote.2<>/Hfootnote.3<>/Hfootnote.4<>/cite.Doyle1997<>/cite.Battaile1997<>/Hfootnote.5<>/Hfootnote.6<>/Hfootnote.7<>/Hfootnote.8<>/Hfootnote.9<>/glo:symb:lambda2<>/glo:symb:Omega_A<>/cite.Asaro1972<>/subfigure.4.40.1<>/subfigure.4.40.2<>/subfigure.4.40.3<>/cite.Marsagli2000<>/cite.Nir1987<>/cite.Silva1997<>/cite.Popat1993<>/chapter*.1<>/chapter*.2<>/cite.Hawkeye2007<>/glo:symb:havg<>/page.1<>/page.2<>/page.3<>/page.4<>/page.5<>/page.6<>/page.7<>/page.8<>/page.9<>>>
endobj
3257 0 obj
<>stream
application/pdf
Das Wachstum amorpher Kohlenstoffschichten auf Basis von Toluol
Christoph Hormann
Amorpher Kohlenstoff
DLC
Wachstumsmodell
Nichtlokale Abschattung
Toluol
2011-10-25T10:35:33Z
LaTeX with hyperref package
2011-10-25T13:01:15+02:00
2011-10-25T13:01:15+02:00
dvips + ESP Ghostscript 8.15
Amorpher Kohlenstoff, DLC, Wachstumsmodell, Nichtlokale Abschattung, Toluol
02acfe88-40d0-4722-b1c5-5eccfe955073
0
uuid:52887a57-0a4a-46bd-a753-d62c37c87257
managed
CABAReT Stage
XMP by CABAReT Stage
2011-10-25T12:58:45+02:00
http://ns.adobe.com/xap/1.0/sType/Version#:event
B
1
endstream
endobj
858 0 obj
<>
endobj
46 0 obj
<>stream
xœµ–wPSéÆ{J: Zè5”Л ½b(*E ÒChRDŠ‚X@ ö†¸,ˆ+êŠT@E/ˆâª¬¬Â=àÞÑ;sgîì̽ÏÌ™ï9¿yßó}ß{þy €ÐËÿ €˜X‘ëlÇZ»ÎŸ…é0 æ€/41øK®Žö¬D´µËþBèúéá··l/ø{¢„ñCÑÏ8 ^‚nŽú‹¨—ñáÚ£¾ °Ä°˜°0 À=FyaÄR
>x±&⇚è¤ÊE‹<†ÏKD}!êUB¢âQ†?³È…ßzÛ—ü½"~h$ÊûPNLNâ£{áGP_"Zì%D.Ö‡Æ}ê5B#yh
áêu¾IR‹³a¡C21071asجØ8;/û¿9’ÿ®ÅôÍ©Ô 9 šzB“„É߀† h
ÚÎàJp5è€Á €1 L3À0ÜîËÁ*°<žÏ?ƒÁË`x¼ö‚ýà 8Ž¯À7à{pü-ƒˆ Q :$± 5H2€L!kÈr…VA¾?ă" H¥C9P!T
í…BG SPÔµC7¡è4M@o¡OÐ<ŒÀb0V€Õa}Ø^»Â\8 ƒcà8.‚wÃà£p=Ü_ƒïÂàçð$ü^@ðQ@´#ÄqCü¤"¹È¤
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