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DOI: 10.5445/IR/1000027341
Veröffentlicht am 27.04.2018
DOI: 10.1186/1556-276X-6-621
Zitationen: 4
Web of Science
Zitationen: 4

Rolled-up tubes and cantilevers by releasing SrRuO₃-Pr₀̣₇Ca₀̣₃MnO₃ nanomembranes

Deneke, C.; Wild, E.; Boldyreva, K.; Baunack, S.; Cendula, P.; Mönch, I.; Simon, M.; Malachias, A.; Dörr, K.; Schmidt, O.G.

Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO3/ Pr0.7Ca0.3MnO3/SrRuO3 nanometer-sized trilayers from SrTiO3(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching behavior of the SrRuO3 film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, μ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.
PACS: 81.07.-b; 68.60.-p; 68.37.Lp; 81.16.Dn.

Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Institut für Organische Chemie (IOC)
Publikationstyp Zeitschriftenaufsatz
Jahr 2011
Sprache Englisch
Identifikator ISSN: 1556-276X, 1931-7573
URN: urn:nbn:de:swb:90-273419
KITopen ID: 1000027341
HGF-Programm 43.14.02; LK 01
Erschienen in Nanoscale research letters
Band 6
Heft 1
Seiten 621/1-8
Schlagworte rolled-up nanotubes and microtubes, freestanding membranes, ferroic oxides, strain engineering
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