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URN: urn:nbn:de:swb:90-307349

Developments and Applications of Synchrotron Radiation Computed Laminography with Micrometer and Nanometer resolution

Xu, Feng

Abstract:
The aim of this thesis is to enable and to improve computed laminography using synchrotron radiation. This has consisted of optimizing imaging setups, techniques and data treatment methods. Extending the techniques towards better resolution and new contrast modes has been the main driving factor. We have exploited a wide variety of imaging applications, ranging from biology and medical studies to in situ and ex situ studies of materials and microelectronic devices.


Zugehörige Institution(en) am KIT Institut für Photonenforschung und Synchrotronstrahlung (IPS)
Publikationstyp Hochschulschrift
Jahr 2012
Sprache Englisch
Identifikator KITopen ID: 1000030734
Verlag Karlsruhe
Abschlussart Dissertation
Fakultät Fakultät für Physik (PHYSIK)
Institut Institut für Photonenforschung und Synchrotronstrahlung (IPS)
Prüfungsdaten 11.05.2012
Referent/Betreuer Prof. T. Baumbach
Schlagworte laminography; Synchrotron; X-ray; Imaging
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