Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Abstract:
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.
| Zugehörige Institution(en) am KIT | Institut für Mikro- und Nanoelektronische Systeme (IMS) |
| Publikationstyp | Hochschulschrift |
| Publikationsjahr | 2013 |
| Sprache | Englisch |
| Identifikator | ISBN: 978-3-7315-0122-0 ISSN: 1869-1765 urn:nbn:de:0072-368759 KITopen-ID: 1000036875 |
| Verlag | KIT Scientific Publishing |
| Umfang | XIII, 175 S. |
| Serie | Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel ; 13 |
| Art der Arbeit | Dissertation |
| Fakultät | Fakultät für Elektrotechnik und Informationstechnik (ETIT) |
| Institut | Institut für Mikro- und Nanoelektronische Systeme (IMS) |
| Prüfungsdaten | 24.09.2013 |
| Schlagwörter | Superconductor, Josephson, Quantum, Multilayer, Cryogenics |
| Referent/Betreuer | Siegel, M. |