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Correlative Nanoscale 3D Imaging of Structure and Composition in Extended Objects

Xu, Feng; Helfen, Lukas; Suhonen, Heikki; Elgrabli, Dan; Bayat, Sam; Reischig, Peter; Baumbach, Tilo; Cloetens, Peter

Structure and composition at the nanoscale determine the behavior of biological systems and engineered materials. The drive to understand and control this behavior has placed strong demands on developing methods for high resolution imaging. In general, the improvement of three-dimensional (3D) resolution is accomplished by tightening constraints: reduced manageable specimen sizes, decreasing analyzable volumes, degrading contrasts, and increasing sample preparation efforts. Aiming to overcome these limitations, we present a non-destructive and multiple-contrast imaging technique, using principles of X-ray laminography, thus generalizing tomography towards laterally extended objects. We retain advantages that are usually restricted to 2D microscopic imaging, such as scanning of large areas and subsequent zooming-in towards a region of interest at the highest possible resolution. Our technique permits correlating the 3D structure and the elemental distribution yielding a high sensitivity to variations of the electron density via coherent imaging and to local trace element quantification through X-ray fluorescence. We demonstrate the method by imaging a lithographic nanostructure and an aluminum alloy. ... mehr

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DOI: 10.5445/IR/1000039916
DOI: 10.1371/journal.pone.0050124
Zitationen: 24
Web of Science
Zitationen: 21
Cover der Publikation
Zugehörige Institution(en) am KIT Laboratorium für Applikationen der Synchrotronstrahlung (LAS)
Institut für Synchrotronstrahlung (ISS)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2012
Sprache Englisch
Identifikator ISSN: 1932-6203
KITopen-ID: 1000039916
HGF-Programm 55.52.10 (POF II, LK 01)
Micro and Nano Science and Technology
Erschienen in PLoS ONE
Band 7
Heft 11
Seiten e50124/1-6
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Nachgewiesen in Web of Science
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