Steigerung der Prozesswiederholbarkeit mittels Analyse akustischer Emissionen bei der Mikrolaserablation mit UV-Pikosekundenlasern

Due to its flexible application lasers are used in many innovative areas. Especially in micro manufacturing tolerances are nerrow and thus make an automated, controlled and regulated process essential. The integration of sensors and the development of monitoring and control units in the process are an important part of current research. The aim of this work is to increase the process repeatability by analyzing acoustic emissions during micro laser ablation with UV picosecond lasers.