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Silica-based monolithic sensing plates for waveguide-mode sensors

Fujimaki, M.; Rockstuhl, C.; Wang, X.; Awazu, K.; Tominaga, J.; Koganezawa, Y.; Ohki, Y.; Komatsubara, T.


We developed a monolithic sensing plate for a waveguide-mode sensor. The plate consists of a SiO2 glass substrate and a thin silicon layer the surface of which is thermally oxidized to form a SiO2 glass waveguide. We confirmed that the sensing plate is suitable for high-sensitivity detection of molecular adsorption at the waveguide surface. In addition, a significant enhancement of the sensitivity of the sensor was achieved by perforating the waveguide with holes with diameters of a few tens of nanometers by selective etching of latent tracks created by swift heavy-ion irradiation. Possible strategies for optimizing the plate are discussed.

Verlagsausgabe §
DOI: 10.5445/IR/1000040829
Veröffentlicht am 24.05.2018
DOI: 10.1364/OE.16.006408
Zitationen: 53
Web of Science
Zitationen: 47
Zitationen: 52
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Theoretische Festkörperphysik (TFP)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2008
Sprache Englisch
Identifikator ISSN: 1094-4087
KITopen-ID: 1000040829
Erschienen in Optics express
Verlag Optica Publishing Group (OSA)
Band 16
Heft 9
Seiten 6408-6416
Nachgewiesen in Dimensions
Web of Science
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