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Hybrid 2D-3D optical devices for integrated optics by direct laser writing

Schumann, Martin; Bückmann, Tiemo; Gruhler, Nico; Wegener, Martin; Pernice, Wolfram

Integrated optical chips have already been established for application in optical communication. They also offer interesting future perspectives for integrated quantum optics on a chip. At present, however, they are mostly fabricated using essentially planar fabrication approaches like electron-beam lithography or UV optical lithography. Many further design options would arise if one had complete fabrication freedom in regard to the third dimension normal to the chip without having to give up the virtues and the know-how of existing planar fabrication technologies. As a step in this direction, we here use three-dimensional dip-in direct-laser-writing optical lithography to fabricate three-dimensional polymeric functional devices on pre-fabricated planar optical chips containing Si3N4 waveguides as well as grating couplers made by standard electron-beam lithography. The first example is a polymeric dielectric rectangular-shaped waveguide which is connected to Si3N4 waveguides and that is adiabatically twisted along its axis to achieve geometrical rotation of linear polarization on the chip. The rotator’s broadband performance at around 1550 nm wavelength is verified by polarization-dependent grating couplers. ... mehr

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DOI: 10.5445/IR/1000042086
DOI: 10.1038/lsa.2014.56
Zitationen: 86
Web of Science
Zitationen: 83
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Nanotechnologie (INT)
Center for Functional Nanostructures (CFN)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2014
Sprache Englisch
Identifikator ISSN: 2047-7538
KITopen-ID: 1000042086
HGF-Programm 43.14.01 (POF II, LK 01)
Photonics crystals and metamaterials
Erschienen in Light
Band 3
Seiten Art.Nr. e175
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Schlagwörter direct laser writing, integrated optics, nanophotonic circuits, polarization conversion
Nachgewiesen in Scopus
Web of Science
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