The coupling behavior of a microparticle embedded amino acid active-ester into a Poly(ethylene glycol)methacrylate-film, synthesized onto a silicon wafer by a grafting from approach, is characterized using dynamic time-of-flight secondary ion mass spectrometry (ToF-SIMS) to analyze the 3d distribution of the amino acids in the polymer film. Besides standard solid phase peptide synthesis, employing solubilized amino acids in a solvent, we used solid polymer microparticles, incorporating the amino acids. These microparticles were especially designed for a new technique to produce high-density combinatorial peptide microarrays: upon heating, the particles become viscous, which releases the embedded amino acids to diffuse and couple to the surface. In the scope of the development of this new particle-based application, ToF-SIMS is used to analyze a complex chemically modified polymer surface layer. Due to depth profile measurements, it is possible to investigate the particle-based coupling reaction not only on the surface, but also into the depth of the PEGMA film.