KIT | KIT-Bibliothek | Impressum

Smooth growth fronts in Si/Ge heteroepitaxy by kinetic growth manipulation

Wulfhekel, W.; Zandvliet, H. J. W.; Hattink, B. J.; Rosenfeld, G.; Comsa, G.; Poelsema, B.

Abstract: A promising route for growing atomically flat Si on Ge(100) is described. The key to this achievement is the control of growth kinetics on an atomic level. We have identified the cause for the development of rough growth fronts: the descent of atoms across steps, a prerequisite fur prolonged layer-by-layer growth, is strongly suppressed at double steps. The developedprocedure for smooth growth avoids the formation of these double steps. The approach can be applied at low temperature (<550 K) and thus inherently avoids ill chemical definition of the interface due to intermixing. It is expected to be generally applicable for epitaxy of pure Si and Ge on both Ge(100) and Si(100) substrates. [S0163-1829(98)03148-8].

Zugehörige Institution(en) am KIT Physikalisches Institut (PHI)
Publikationstyp Zeitschriftenaufsatz
Jahr 1998
Sprache Englisch
Identifikator DOI: 10.1103/PhysRevB.58.15359
ISSN: 1098-0121
KITopen ID: 1000053865
Erschienen in Physical Review B - Condensed Matter and Materials Physics
Band 58
Heft 23
Seiten 15359-15362
KIT – Die Forschungsuniversität in der Helmholtz-Gemeinschaft KITopen Landing Page