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Ultra-thin graphene–polymer heterostructure membranes

Berger, Christian N.; Dirschka, M. 1; Vijayaraghavan, Aravind
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)


The fabrication of arrays of ultra-thin conductive membranes remains a major challenge in realising large-scale micro/nano-electromechanical systems (MEMS/NEMS), since processing-stress and stiction issues limit the precision and yield in assembling suspended structures. We present the fabrication and mechanical characterisation of a suspended graphene–polymer heterostructure membrane that aims to tackle the prevailing challenge of constructing high yield membranes with minimal compromise to the mechanical properties of graphene. The fabrication method enables suspended membrane structures that can be multiplexed over wafer-scales with 100% yield. We apply a micro-blister inflation technique to measure the in-plane elastic modulus of pure graphene and of heterostructure membranes with a thickness of 18 nm to 235 nm, which ranges from the 2-dimensional (2d) modulus of bare graphene at 173 ± 55 N m$^{-1}$ to the bulk elastic modulus of the polymer (Parylene-C) as 3.6 ± 0.5 GPa as a function of film thickness. Different ratios of graphene to polymer thickness yield different deflection mechanisms and adhesion and delamination effects which are consistent with the transition from a membrane to a plate model. ... mehr

Verlagsausgabe §
DOI: 10.5445/IR/1000061964
Veröffentlicht am 30.12.2021
DOI: 10.1039/C6NR06316K
Zitationen: 23
Web of Science
Zitationen: 22
Zitationen: 25
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2016
Sprache Englisch
Identifikator ISSN: 2040-3364, 2040-3372
KITopen-ID: 1000061964
HGF-Programm 47.02.07 (POF III, LK 01) Zellpopul.auf Biofunk.Oberflächen IMT
Erschienen in Nanoscale
Verlag Royal Society of Chemistry (RSC)
Band 8
Heft 41
Seiten 17928-17939
Vorab online veröffentlicht am 05.09.2016
Nachgewiesen in Dimensions
Web of Science
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