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Application of DoE methods to establish a model for the pulsed laser deposition of PZT thin-films

Schatz, A.; Hanemann, T. 1; Pantel, D.
1 Karlsruher Institut für Technologie (KIT)


Controlling the growth of piezoelectric lead zirconate titanate (Pb[ZrxTi1-x]O3 – PZT) thin-films is a key issue for their application in sensor and actuator devices. The pulsed laser deposition (PLD) process which is used in this work to grow PZT on platinized 150 mm silicon wafers can be easily modified by changing deposition parameters as the deposition pressure, deposition temperature, laser spot area on the target or laser pulse energy. In order to investigate the influence of these PLD parameters on the deposition rate and properties of the PZT thin-film as the leakage current density or the transverse piezoelectric coefficient e31,f, statistical Design of Experiment methods were applied. Empirical models could be derived, describing the thin-film properties as function of the deposition parameters. It is observed that not only the PZT deposition parameters but also the parameters which are modified for the deposition of the LaNiO3 (LNO) template need to be controlled carefully. The parameters with the highest effect on the e31,f are shown to be the combination of deposition pressure and deposition temperature of the PZT layer, where either both high or low values lead to good PZT properties.

Volltext §
DOI: 10.5445/IR/1000062269
DOI: 10.1109/ISAF.2016.7578062
Zitationen: 2
Zitationen: 3
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Angewandte Materialien – Werkstoffkunde (IAM-WK)
Publikationstyp Proceedingsbeitrag
Publikationsjahr 2016
Sprache Englisch
Identifikator ISBN: 978-1-5090-1871-0
KITopen-ID: 1000062269
HGF-Programm 43.22.03 (POF III, LK 01) Printed Materials and Systems
Erschienen in Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Application of Polar Dielectrics, and Piezoelectric Force Microscopy Workshop (ISAF/ECAPD/PFM), Darmstadt, Germany, 21-25 August 2016
Verlag Institute of Electrical and Electronics Engineers (IEEE)
Seiten 1-4
Schlagwörter PZT; MEMS; DoE; piezoelectric, model
Nachgewiesen in Dimensions
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