KIT | KIT-Bibliothek | Impressum
Open Access Logo

Garnet-type Li₇La₃Zr₂O₁₂ solid electrolyte thin films grown by Co₂-laser assisted CVD for all-solid-state batteries

Loho, Christoph; Djenadic, Ruzika; Bruns, Michael; Clemens, Oliver; Hahn, Horst

Abstract:
The detailed characterization of garnet-type Li-ion conducting Li₇La₃Zr₂O₁₂ (LLZO) solid electrolyte thin films grown by novel CO2-laser assisted chemical vapor deposition (LA-CVD) is reported. A deposition process parameter study reveals that an optimal combination of deposition temperature and oxygen partial pressure is essential to obtain high quality tetragonal LLZO thin films. The polycrystalline tetragonal LLZO films grown on platinum have a dense and homogeneous microstructure and are free of cracks. A total lithium ion conductivity of 4.2·10−6 S·cm−1 at room temperature, with an activation energy of 0.50 eV, is achieved. This is the highest total lithium ion conductivity value reported for tetragonal LLZO thin films so far, being about one order of magnitude higher than previously reported values for tetragonal LLZO thin films prepared by sputtering and pulsed laser deposition. The results of this study suggest that the tetragonal LLZO thin films grown by LA-CVD are applicable for the use in all-solid-state thin film lithium ion batteries.


Zugehörige Institution(en) am KIT Helmholtz-Institut Ulm (HIU)
Institut für Angewandte Materialien - Energiespeichersysteme (IAM-ESS)
Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Jahr 2017
Sprache Englisch
Identifikator ISSN: 0013-4651, 0096-4743, 0096-4786, 1945-7111
KITopen ID: 1000062770
HGF-Programm 37.01.01; LK 01
Erschienen in Journal of the Electrochemical Society
Band 164
Heft 1
Seiten A6131-A6139
Schlagworte All-solid-state lithium ion battery, Chemical vapor deposition, Garnet-type Li₇La₃Zr₂O₁₂, Ionic conductivity, Solid electrolyte, Thin film
KIT – Die Forschungsuniversität in der Helmholtz-Gemeinschaft KITopen Landing Page