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Garnet-type Li₇La₃Zr₂O₁₂ solid electrolyte thin films grown by Co₂-laser assisted CVD for all-solid-state batteries

Loho, Christoph 1; Djenadic, Ruzika; Bruns, Michael 2; Clemens, Oliver 1; Hahn, Horst 3,4
1 Karlsruher Institut für Technologie (KIT)
2 Karlsruhe Nano Micro Facility (KNMF), Karlsruher Institut für Technologie (KIT)
3 Institut für Nanotechnologie (INT), Karlsruher Institut für Technologie (KIT)
4 Center for Electrochemical Energy Storage Ulm & Karlsruhe (CELEST), Karlsruher Institut für Technologie (KIT)


The detailed characterization of garnet-type Li-ion conducting Li₇La₃Zr₂O₁₂ (LLZO) solid electrolyte thin films grown by novel CO2-laser assisted chemical vapor deposition (LA-CVD) is reported. A deposition process parameter study reveals that an optimal combination of deposition temperature and oxygen partial pressure is essential to obtain high quality tetragonal LLZO thin films. The polycrystalline tetragonal LLZO films grown on platinum have a dense and homogeneous microstructure and are free of cracks. A total lithium ion conductivity of 4.2·10−6 S·cm−1 at room temperature, with an activation energy of 0.50 eV, is achieved. This is the highest total lithium ion conductivity value reported for tetragonal LLZO thin films so far, being about one order of magnitude higher than previously reported values for tetragonal LLZO thin films prepared by sputtering and pulsed laser deposition. The results of this study suggest that the tetragonal LLZO thin films grown by LA-CVD are applicable for the use in all-solid-state thin film lithium ion batteries.

Verlagsausgabe §
DOI: 10.5445/IR/1000062770
Veröffentlicht am 18.01.2018
DOI: 10.1149/2.0201701jes
Zitationen: 101
Web of Science
Zitationen: 93
Zitationen: 101
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Angewandte Materialien – Energiespeichersysteme (IAM-ESS)
Helmholtz-Institut Ulm (HIU)
Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2017
Sprache Englisch
Identifikator ISSN: 0013-4651, 0096-4743, 0096-4786, 1945-7111
KITopen-ID: 1000062770
HGF-Programm 37.01.01 (POF III, LK 01) Fundamentals and Materials
Erschienen in Journal of the Electrochemical Society
Verlag Electrochemical Society
Band 164
Heft 1
Seiten A6131-A6139
Schlagwörter All-solid-state lithium ion battery, Chemical vapor deposition, Garnet-type Li₇La₃Zr₂O₁₂, Ionic conductivity, Solid electrolyte, Thin film; 2015-013-006349 ToF-SIMS XPS
Nachgewiesen in Scopus
Web of Science
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