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Polymer compound refractive lenses for hard X-ray nanofocusing

Krywka, Christina; Last, Arndt 1; Marschall, Felix; Márkus, Ottó 1; Georgi, Sebastian 1; Müller, Martin; Mohr, Jürgen 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)

Abstract:

Compound refractive lenses fabricated out of SU-8 negative photoresist have been used to generate a nanofocused, i.e. sub-µm sized X-ray focal spot at an X-ray nanodiffraction setup. X-ray microscopy and X-ray diffraction techniques have conceptually different demands on nanofocusing optical elements and so with the application of X-ray nanodiffraction in mind, this paper presents the results of an initial characterization of polymer lenses used as primary focusing device at an X-ray nanodiffraction synchrotron beamline. A beam size of ∼ 600 nm was achieved at a photon energy of 13 keV following only a short initial alignment, with the focal spot representing a demagnified, direct image of the undulator source.


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Originalveröffentlichung
DOI: 10.1063/1.4961129
Scopus
Zitationen: 15
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Zitationen: 14
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Universität Karlsruhe (TH) – Interfakultative Einrichtungen (Interfakultative Einrichtungen)
Karlsruhe School of Optics & Photonics (KSOP)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2016
Sprache Englisch
Identifikator ISSN: 0094-243X, 1551-7616
KITopen-ID: 1000063501
HGF-Programm 43.23.02 (POF III, LK 01) X-Ray Optics
Erschienen in AIP conference proceedings
Verlag American Institute of Physics (AIP)
Band 1764
Heft 1
Seiten Art. Nr. 020001
Externe Relationen Siehe auch
Schlagwörter X-ray diffraction, X-ray microscopy, LensesHard X-rays, Nanodiffraction
Nachgewiesen in Scopus
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