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Root Cause Analysis of ZRO Sources in a MEMS Gyroscope

Meyer, Lena; Buhmann, Alexander; Eid, Rudy; Korvink, Jan

Abstract (englisch):
This paper analyses the root causes of zero-rate output in MEMS vibratory gyroscopes. Zero-rate output is one of the major challenges for high performance gyroscopes. The knowledge of its causes is important to minimize zero-rate output and achieve a robust sensor design. In this paper, a new method to describe a MEMS gyroscope with a parametric state space model is introduced. The model is used to theoretically describe the behavioural influences. A new, more detailed and general gyroscope approximation is used to vary influence parameters, and to verify the method with simulations. The focus is on varying stiffness terms, and an extension of the model to other gyroscope approximations is also discussed.


Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2016
Sprache Englisch
Identifikator DOI: 10.1109/JSEN.2016.2636563
ISSN: 1530-437X, 1558-1748, 2379-9153
KITopen ID: 1000063513
HGF-Programm 43.22.01; LK 01
Erschienen in IEEE sensors journal
Band 17
Heft 4
Seiten 959-966
Bemerkung zur Veröffentlichung http://ieeexplore.ieee.org/document/7776823/
Schlagworte zero-rate output (ZRO), gyroscope, microelectromechanical system (MEMS), parametric state space models
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