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Patterning of two-dimensional electron systems in SrTiO₃ based heterostructures using a CeO₂ template

Fuchs, D.; Wolff, K.; Schäfer, R.; Thelen, R.; Le Tacon, M.; Schneider, R.

Abstract (englisch): Two-dimensional electron systems found at the interface of SrTiO3-based oxide heterostructures often display anisotropic electric transport whose origin is currently under debate. To characterize transport along specific crystallographic directions, we developed a hard-mask patterning routine based on an amorphous CeO2 template layer. The technique allows preparing well-defined microbridges by conventional ultraviolet photolithography which, in comparison to standard techniques such as ion- or wet-chemical etching, does not induce any degradation of interfacial conductance. The patterning scheme is described in detail and the successful production of microbridges based on amorphous Al2O3-SrTiO3 heterostructures is demonstrated. Significant anisotropic transport is observed for T < 30 K which is mainly related to impurity/defect scattering of charge carriers in these heterostructures.

Zugehörige Institution(en) am KIT Institut für Festkörperphysik (IFP)
Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2017
Sprache Englisch
Identifikator DOI: 10.1063/1.4973696
ISSN: 2158-3226
KITopen ID: 1000064928
HGF-Programm 43.21.01; LK 01
Erschienen in AIP Advances
Band 7
Heft 5
Seiten Art. Nr.: 056410
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