Development of Shape Memory Alloy - Si Bimorph Nanoactuators
Abstract:
Belonging to the group of Smart Materials, Shape Memory Alloys (SMAs) generate large work outputs per volume density, especially in small dimensions. Furthermore, they exhibit multifunctional performance and provide biocompatibility. Hence, shape memory alloys are predestined for applications on the nanoscale. This work presents the fabrication, characterization of NiMnGa/Si bimorph double beam nanoactuators and their integration within a Si-photonics on-chip waveguide structure.
| Zugehörige Institution(en) am KIT | Institut für Mikrostrukturtechnik (IMT) |
| Publikationstyp | Hochschulschrift |
| Publikationsjahr | 2016 |
| Sprache | Englisch |
| Identifikator | urn:nbn:de:swb:90-651049 KITopen-ID: 1000065104 |
| HGF-Programm | 43.22.01 (POF III, LK 01) Functionality by Design |
| Verlag | Karlsruher Institut für Technologie (KIT) |
| Umfang | XV, 123 S. |
| Art der Arbeit | Dissertation |
| Fakultät | Fakultät für Maschinenbau (MACH) |
| Institut | Institut für Mikrostrukturtechnik (IMT) |
| Prüfungsdaten | 16.12.2016 |
| Schlagwörter | Shape Memory Alloy, Bimorph, Nano, Actuator |
| Nachgewiesen in | OpenAlex |
| Referent/Betreuer | Kohl, M. |
