Development of Shape Memory Alloy - Si Bimorph Nanoactuators

Belonging to the group of Smart Materials, Shape Memory Alloys (SMAs) generate large work outputs per volume density, especially in small dimensions. Furthermore, they exhibit multifunctional performance and provide biocompatibility. Hence, shape memory alloys are predestined for applications on the nanoscale. This work presents the fabrication, characterization of NiMnGa/Si bimorph double beam nanoactuators and their integration within a Si-photonics on-chip waveguide structure.