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DOI: 10.5445/IR/1000065104

Development of Shape Memory Alloy - Si Bimorph Nanoactuators

Lambrecht, Franziska

Belonging to the group of Smart Materials, Shape Memory Alloys (SMAs) generate large work outputs per volume density, especially in small dimensions. Furthermore, they exhibit multifunctional performance and provide biocompatibility. Hence, shape memory alloys are predestined for applications on the nanoscale. This work presents the fabrication, characterization of NiMnGa/Si bimorph double beam nanoactuators and their integration within a Si-photonics on-chip waveguide structure.

Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Hochschulschrift
Jahr 2016
Sprache Englisch
Identifikator URN: urn:nbn:de:swb:90-651049
KITopen ID: 1000065104
Verlag Karlsruhe
Umfang XV, 123 S.
Abschlussart Dissertation
Fakultät Fakultät für Maschinenbau (MACH)
Institut Institut für Mikrostrukturtechnik (IMT)
Prüfungsdaten 16.12.2016
Referent/Betreuer Prof. M. Kohl
Schlagworte Shape Memory Alloy, Bimorph, Nano, Actuator
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