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A novel hybrid contactless suspension with adjustable spring constant

Poletkin, Kirill V.

Abstract (englisch):
A novel hybrid Contactless Suspension (CS), in which a vertical component of stiffness is decreased in a controlled manner, is presented. The decreasing is performed by means of the electrostatic field generated by a set of electrodes and acting on an electromagnetically levitating, conductive disk-shaped Proof Mass (PM). The preliminary, experimental results accompanied by a quasi-exact nonlinear modelling prove the concept and showed the successful levitation of the PM within electrostatic field together with the controlled decrease of the stiffness from 0.043 to 0.03 N/m. The suspension establishes a promising direction for the further improvement in the performance of micro-sensors.

Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Proceedingsbeitrag
Jahr 2017
Sprache Englisch
Identifikator DOI: 10.1109/TRANSDUCERS.2017.7994203
ISBN: 978-1-5386-2733-4
KITopen ID: 1000071706
HGF-Programm 43.22.01; LK 01
Erschienen in 19th International Conference on Solid-State Sensors, Actuators and Microsystems Transducers, Kaohsiung, Taiwan, June 18-22, 2017
Verlag IEEE, Piscataway (NJ)
Seiten 934-937
Schlagworte Electro-magnetic levitation, contactless suspension, adjustable stiffness, stable levitation, micro-accelerometer
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