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A qualitative technique to study stability and dynamics of micro-machined inductive contactless suspensions

Poletkin, Kirill V.; Zhiqiu, Lu; Wallrabe, Ulrike; Korvink, Jan; Badilita, Vlad

Abstract (englisch):
qualitative technique to study dynamics and stability of Micro-machined contactless Inductive Suspensions (MIS) is presented, which provides a powerful analytical tool for a comprehensive study of a wide range of MIS designs. The main idea for this technique is to represent the induced eddy current into a levitated micro-object as a collection of m-eddy current circuits. It allows us to obtain a generalized linear model of MIS, based on which general stability properties of MIS are investigated. We demonstrate the successful
application of this technique to study the symmetric and axially symmetric MIS designs of real prototypes.

DOI: 10.1109/TRANSDUCERS.2017.7994102
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Proceedingsbeitrag
Publikationsjahr 2017
Sprache Englisch
Identifikator ISBN: 978-1-5386-2733-4
KITopen-ID: 1000071708
HGF-Programm 43.22.01 (POF III, LK 01) Functionality by Design
Erschienen in 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June, 18-22, 2017
Verlag Institute of Electrical and Electronics Engineers (IEEE)
Seiten 528-531
Schlagwörter Electro-magnetic levitation, contactless suspension, micro-transporter, stability
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