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A qualitative technique to study stability and dynamics of micro-machined inductive contactless suspensions [in press]

Poletkin, K.V.; Zhiqiu, Lu; Wallrabe, Ulrike; Korvink, Jan; Badilita, Vlad

Abstract (englisch):
qualitative technique to study dynamics and
stability of Micro-machined contactless Inductive
Suspensions (MIS) is presented, which provides a
powerful analytical tool for a comprehensive study of a
wide range of MIS designs. The main idea for this
technique is to represent the induced eddy current into a
levitated micro-object as a collection of m-eddy current
circuits. It allows us to obtain a generalized linear model
of MIS, based on which general stability properties of
MIS are investigated. We demonstrate the successful
application of this technique to study the symmetric and
axially symmetric MIS designs of real prototypes.


Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Proceedingsbeitrag
Jahr 2017
Sprache Englisch
Identifikator KITopen ID: 1000071708
HGF-Programm 43.22.01; LK 01
Erschienen in 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), At Kaohsiung, Taiwan, June, 18-22, 2017
Seiten 528-531
Schlagworte Electro-magnetic levitation, contactless suspension, micro-transporter, stability
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