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Miniaturized compound refractive X-ray zoom lens

Kornemann, E.; Márkus, O.; Opolka, A.; Zhou, T.; Greving, I.; Storm, M.; Krywka, C.; Last, A.; Mohr, J.

Abstract (englisch):
We introduce the concept of a miniaturized compound refractive X-ray zoom lens consisting of SU-8 lenses fabricated by deep X-ray lithography. The focal length can be varied by changing the number of lens elements placed in the beam. We use suitable actuators to move single lens elements reversibly out of the beam. The X-ray zoom lens can accept different X-ray energies while keeping a fixed working distance, or vary the focal distance for a fixed energy. The latter is useful in tuning the magnification factor in full field microscopy.

Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2017
Sprache Englisch
Identifikator DOI: 10.1364/OE.25.022455
ISSN: 1094-4087
KITopen ID: 1000073754
HGF-Programm 43.23.03; LK 01
Erschienen in Optics express
Band 25
Heft 19
Seiten 22455-22466
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