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Toward new gas-analytical multisensor chips based on titanium oxide nanotube array

Fedorov, Fedor; Vasilkov, Michail; Lashkov, Andrey; Varezhnikov, Alexey; Fuchs, Dirk; Kübel, Christian; Bruns, Michael; Sommer, Martin; Sysoev, Victor

Reliable environmental monitoring requires cost effective but highly sensitive and selective gas sensors. While the sensitivity of the sensors is improved by reducing the characteristic dimensions of the gas-sensing material, the selectivity is often approached by combining the sensors into multisensor arrays. The development of scalable methods to manufacture such arrays based on low-dimensional structures offers new perspectives for gas sensing applications. Here we examine an approach to produce multisensor array chips based on the TiO$_{x}$ nanotube layers segmented by multiple Pt strip electrodes. We study the sensitivity and selectivity of the developed chip at operating temperatures up to 400 °C towards organic vapors in the ppm range. The results indicate that the titania nanotubes are a promising material platform for novel cost-effective and powerful gas-analytical multisensor units.

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DOI: 10.5445/IR/1000074064
DOI: 10.1038/s41598-017-10495-8
Zitationen: 10
Web of Science
Zitationen: 5
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Institut für Festkörperphysik (IFP)
Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Jahr 2017
Sprache Englisch
Identifikator ISSN: 2045-2322
KITopen-ID: 1000074064
HGF-Programm 49.02.01 (POF III, LK 02)
Erschienen in Scientific reports
Band 7
Heft 1
Seiten Art. Nr. 9732
Nachgewiesen in Web of Science
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