KIT | KIT-Bibliothek | Impressum | Datenschutz

Toward new gas-analytical multisensor chips based on titanium oxide nanotube array

Fedorov, Fedor; Vasilkov, Michail; Lashkov, Andrey; Varezhnikov, Alexey; Fuchs, Dirk 1; Kübel, Christian ORCID iD icon 2,3; Bruns, Michael 3; Sommer, Martin 4; Sysoev, Victor
1 Karlsruher Institut für Technologie (KIT)
2 Institut für Nanotechnologie (INT), Karlsruher Institut für Technologie (KIT)
3 Karlsruhe Nano Micro Facility (KNMF), Karlsruher Institut für Technologie (KIT)
4 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)


Reliable environmental monitoring requires cost effective but highly sensitive and selective gas sensors. While the sensitivity of the sensors is improved by reducing the characteristic dimensions of the gas-sensing material, the selectivity is often approached by combining the sensors into multisensor arrays. The development of scalable methods to manufacture such arrays based on low-dimensional structures offers new perspectives for gas sensing applications. Here we examine an approach to produce multisensor array chips based on the TiO$_{x}$ nanotube layers segmented by multiple Pt strip electrodes. We study the sensitivity and selectivity of the developed chip at operating temperatures up to 400 °C towards organic vapors in the ppm range. The results indicate that the titania nanotubes are a promising material platform for novel cost-effective and powerful gas-analytical multisensor units.

Volltext §
DOI: 10.5445/IR/1000074064
DOI: 10.1038/s41598-017-10495-8
Zitationen: 27
Web of Science
Zitationen: 23
Zitationen: 32
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Festkörperphysik (IFP)
Institut für Mikrostrukturtechnik (IMT)
Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2017
Sprache Englisch
Identifikator ISSN: 2045-2322
KITopen-ID: 1000074064
HGF-Programm 49.02.01 (POF III, LK 02) INT-KNMF Characterisation Lab
Erschienen in Scientific reports
Verlag Nature Research
Band 7
Heft 1
Seiten Art. Nr. 9732
Nachgewiesen in Scopus
Web of Science
KIT – Die Forschungsuniversität in der Helmholtz-Gemeinschaft
KITopen Landing Page