KIT | KIT-Bibliothek | Impressum
Open Access Logo
URN: urn:nbn:de:swb:90-740648

Toward new gas-analytical multisensor chips based on titanium oxide nanotube array

Fedorov, Fedor; Vasilkov, Michail; Lashkov, Andrey; Varezhnikov, Alexey; Fuchs, Dirk; Kübel, Christian; Bruns, Michael; Sommer, Martin; Sysoev, Victor

Reliable environmental monitoring requires cost effective but highly sensitive and selective gas sensors. While the sensitivity of the sensors is improved by reducing the characteristic dimensions of the gas-sensing material, the selectivity is often approached by combining the sensors into multisensor arrays. The development of scalable methods to manufacture such arrays based on low-dimensional structures offers new perspectives for gas sensing applications. Here we examine an approach to produce multisensor array chips based on the TiO$_{x}$ nanotube layers segmented by multiple Pt strip electrodes. We study the sensitivity and selectivity of the developed chip at operating temperatures up to 400 °C towards organic vapors in the ppm range. The results indicate that the titania nanotubes are a promising material platform for novel cost-effective and powerful gas-analytical multisensor units.

Zugehörige Institution(en) am KIT Institut für Festkörperphysik (IFP)
Institut für Mikrostrukturtechnik (IMT)
Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Jahr 2017
Sprache Englisch
Identifikator ISSN: 2045-2322
URN: urn:nbn:de:swb:90-740648
KITopen ID: 1000074064
HGF-Programm 49.02.01; LK 02
Erschienen in Scientific reports
Band 7
Heft 1
Seiten Art. Nr. 9732
KIT – Die Forschungsuniversität in der Helmholtz-Gemeinschaft KITopen Landing Page