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DOI: 10.5445/IR/1000074121

Custom-Designed Glassy Carbon Tips for Atomic Force Microscopy

Zakhurdaeva, Anna; Dietrich, Philipp-Immanuel; Hölscher, Hendrik; Koos, Christian; Korvink, Jan; Sharma, Swati

Glassy carbon is a graphenic form of elemental carbon obtained from pyrolysis of carbon-rich precursor polymers that can be patterned using various lithographic techniques. It is electrically and thermally conductive, mechanically strong, light, corrosion resistant and easy to functionalize. These properties render it very suitable for Carbon-microelectromechanical systems (Carbon-MEMS) and nanoelectromechanical systems (Carbon-NEMS) applications. Here we report on the fabrication and characterization of fully operational, microfabricated glassy carbon nano-tips for Atomic Force Microscopy (AFM). These tips are 3D-printed on to micro-machined silicon cantilevers by Two-Photon Polymerization (2PP) of acrylate-based photopolymers (commercially known as IP-series resists), followed by their carbonization employing controlled pyrolysis, which shrinks the patterned structure by ≥98% in volume. Tip performance and robustness during contact and dynamic AFM modes are validated by morphology and wear tests. The design and pyrolysis process optimization performed for this work indicate which parameters require special attention when IP-series ... mehr

Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Karlsruhe Nano Micro Facility (KNMF)
Institut für Photonik und Quantenelektronik (IPQ)
Publikationstyp Zeitschriftenaufsatz
Jahr 2017
Sprache Englisch
Identifikator ISSN: 2072-666X
URN: urn:nbn:de:swb:90-741216
KITopen ID: 1000074121
HGF-Programm 43.22.01; LK 01
Erschienen in Micromachines
Band 8
Heft 9
Seiten Art. Nr. 285
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
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