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Custom-Designed Glassy Carbon Tips for Atomic Force Microscopy

Zakhurdaeva, Anna 1; Dietrich, Philipp-Immanuel 1,2; Hölscher, Hendrik ORCID iD icon 1; Koos, Christian 1,2; Korvink, Jan 1; Sharma, Swati 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)
2 Institut für Photonik und Quantenelektronik (IPQ), Karlsruher Institut für Technologie (KIT)


Glassy carbon is a graphenic form of elemental carbon obtained from pyrolysis of carbon-rich precursor polymers that can be patterned using various lithographic techniques. It is electrically and thermally conductive, mechanically strong, light, corrosion resistant and easy to functionalize. These properties render it very suitable for Carbon-microelectromechanical systems (Carbon-MEMS) and nanoelectromechanical systems (Carbon-NEMS) applications. Here we report on the fabrication and characterization of fully operational, microfabricated glassy carbon nano-tips for Atomic Force Microscopy (AFM). These tips are 3D-printed on to micro-machined silicon cantilevers by Two-Photon Polymerization (2PP) of acrylate-based photopolymers (commercially known as IP-series resists), followed by their carbonization employing controlled pyrolysis, which shrinks the patterned structure by ≥98% in volume. Tip performance and robustness during contact and dynamic AFM modes are validated by morphology and wear tests. The design and pyrolysis process optimization performed for this work indicate which parameters require special attention when IP-series polymers are used for the fabrication of Carbon-MEMS and NEMS. ... mehr

Volltext §
DOI: 10.5445/IR/1000074121
DOI: 10.3390/mi8090285
Zitationen: 35
Web of Science
Zitationen: 31
Zitationen: 38
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Institut für Photonik und Quantenelektronik (IPQ)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2017
Sprache Englisch
Identifikator ISSN: 2072-666X
KITopen-ID: 1000074121
HGF-Programm 43.22.01 (POF III, LK 01) Functionality by Design
Erschienen in Micromachines
Verlag MDPI
Band 8
Heft 9
Seiten Art. Nr. 285
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Nachgewiesen in Dimensions
Web of Science
Globale Ziele für nachhaltige Entwicklung Ziel 9 – Industrie, Innovation und Infrastruktur
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