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Additive manufacturing of microfluidic glass chips

Kotz, Frederik; Helmer, Dorothea; Rapp, Bastian E.

Abstract (englisch):
Additive manufacturing has gained great interest in the microfluidic community due to the numerous channel designs which can be tested in the early phases of a lab-on-a-chip device development. High resolution additive manufacturing like microstereolithography is largely associated with polymers. Polymers are at a disadvantage compared to other materials due to their softness and low chemical resistance. Whenever high chemical and thermal resistance combined with high optical transparency is needed, glasses become the material of choice. However, glasses are difficult to structure at the microscale requiring hazardous chemicals for etching processes. In this work we present additive manufacturing and high resolution patterning of microfluidic chips in transparent fused silica glass using stereolithography and microlithography. We print an amorphous silica nanocomposite at room temperature using benchtop stereolithography printers and a custom built microlithography system based on a digital mirror device. Using microlithography we printed structures with tens of micron resolution. The printed part is then converted to a transparent ... mehr

DOI: 10.1117/12.2287654
Zitationen: 2
Seitenaufrufe: 29
seit 25.04.2018
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Proceedingsbeitrag
Jahr 2018
Sprache Englisch
Identifikator ISBN: 978-1-5106-1467-3
ISSN: 0277-786X
KITopen-ID: 1000081359
HGF-Programm 47.02.07 (POF III, LK 01)
Erschienen in Microfluidics, BioMEMS, and Medical Microsystems XVI, San Francisco, CA, January 27 - February 1, 2018
Verlag SPIE, Bellingham, WA
Seiten 9
Serie Proceedings of SPIE ; 10491
Nachgewiesen in Scopus
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