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Seamless tool fabrication for Roll-to-Roll microreplication

Striegel, A.; Schneider, M.; Schneider, N.; Benkel, Ch.; Worgull, M.

Abstract (englisch):
Roll-to-Roll microreplication combines the precision of hot embossing with continuous cost efficient replication on polymer films on large scale. For a viable realisation of this process, the main challenge for Roll-to-Roll hot embossing is the transfer from conventional flat silicon based micro structuring technology, to curved, large scale surfaces on continuously working rolls. This article presents lithography and electroplating based fabrication method of seamless microstructured sleeves and the Roll-to-Roll microreplication in a selection of high performance polymers like PEEK, LCP, PTFE, FEP, PSU and metal films such as aluminum and copper.

DOI: 10.1016/j.mee.2018.02.022
Zitationen: 8
Web of Science
Zitationen: 8
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2018
Sprache Englisch
Identifikator ISSN: 0167-9317, 1873-5568
KITopen-ID: 1000081360
HGF-Programm 43.22.03 (POF III, LK 01)
Erschienen in Microelectronic engineering
Band 194
Seiten 8-14
Bemerkung zur Veröffentlichung
Schlagworte 2015-014-008269 HE
Nachgewiesen in Scopus
Web of Science
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