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Energy-aware 3D micro-machined inductive suspensions with polymer magnetic composite core

Poletkin, K. V. 1; Lu, Z.; Moazenzadeh, A.; Mariappan, S. G.; Korvink, J. G. 1; Wallrabe, U.; Badilita, V. 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)


This paper addresses the issue of Joule heating in micromachined inductive suspensions (MIS) and reports a significant decrease of the operating temperature by using a polymer magnetic composite (PMC) core. The PMC material has a high resistivity, thus inhibiting the formation of eddy currents, and a high permeability, thus guiding the magnetic field more efficiently within the MIS structure. We experimentally study the distribution of the PMC material inside the MIS structure and evaluate the effect of the core from the dependence of the levitation height on the excitation current. The experiments carried on in ambient room temperature demonstrate that the temperature inside the micromachined inductive suspension is reduced to 58°C, which is a record-low temperature compared to other MIS structures reported before.

Verlagsausgabe §
DOI: 10.5445/IR/1000085515
Veröffentlicht am 27.08.2018
DOI: 10.1088/1742-6596/1052/1/012048
Zitationen: 1
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 07.2018
Sprache Englisch
Identifikator ISSN: 1742-6588, 1742-6596
KITopen-ID: 1000085515
HGF-Programm 43.22.01 (POF III, LK 01) Functionality by Design
Erschienen in Journal of physics / Conference Series
Verlag Institute of Physics Publishing Ltd (IOP Publishing Ltd)
Band 1052
Seiten 012048
Bemerkung zur Veröffentlichung 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2017), Kanazawa, J, November 14-17, 2017
Vorab online veröffentlicht am 26.07.2018
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