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Efficient aerosol assisted delivery of low-volatility precursor for CVD applications

Pasin, Laila 1; Meyer, Jörg 1; Eiche, Elisabeth ORCID iD icon 2; Weis, Frederik; Kasper, Gerhard 1
1 Institut für Mechanische Verfahrenstechnik und Mechanik (MVM), Karlsruher Institut für Technologie (KIT)
2 Institut für Angewandte Geowissenschaften (AGW), Karlsruher Institut für Technologie (KIT)

Abstract (englisch):

An improved lab-scale process for coating of carrier particles by aerosol assisted chemical vapor deposition (CVD) is described and characterized to produce a highly dispersed, supported noble- metal catalysts. The process is based on a fluidized bed (FB) operated at atmospheric pressure and focusses on an efficient and lossless delivery of precursor vapor, including vapors of low-volatility precursors, to the bed. Precursor is aerosolized (at ambient temperature) applying a suitable solution and then delivered into the FB from above via a double-walled heated tube in which the aerosol is sublimated, the vapor is adsorbed on the carrier particles and then decomposed.
Degree of sublimation, delivery rates and usage efficiencies were investigated applying a tandem-DMA set-up with two precursor substances, namely Pd(TMHD)2 and MeCpPtMe3 dis- solved in butanone. At 150 °C and a residence time of about 2.5 s, precursor aerosol particles up to about 700 nm were found to sublimate to ≥ 99%. The degree of sublimation could have been increased further by extending the residence time in the sublimation zone. For higher volatility precursors, vaporization/sublimation can be assumed to be complete.
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DOI: 10.1016/j.jaerosci.2018.09.003
Zitationen: 1
Zitationen: 2
Zugehörige Institution(en) am KIT Institut für Angewandte Geowissenschaften (AGW)
Institut für Mechanische Verfahrenstechnik und Mechanik (MVM)
KIT-Zentrum Klima und Umwelt (ZKU)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 12.2018
Sprache Englisch
Identifikator ISSN: 0021-8502
KITopen-ID: 1000089442
Erschienen in Journal of aerosol science
Verlag Elsevier
Band 126
Seiten 180–190
Nachgewiesen in Dimensions
Web of Science
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