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Miniaturization of Shape Memory Actuators (Invited Review)

Kohl, Manfred; Fechner, Randy; Gueltig, Marcel; Megnin, Christoph; Ossmer, Hinnerk

Abstract (englisch):

Actuation on small scales has been an issue since the early nineties, where MEMS technology has been still in its infancy. Silicon is not a transducer material. Therefore additional materials have to be introduced for conversion of energy into mechanical work. Among the various transducer materials shape memory alloys (SMAs) offer a number of unique properties including thermoelasticity, superelasticity, actuation at highest work densities up to 107 Jm-3 and self-sensing. Their characteristic of being a “smart material” becomes particularly advantageous upon
miniaturization, as technology constraints pose severe limitations on the number, geometry and size of functional structures. This review addresses the ongoing miniaturization of SMA actuators from miniature SMA wire-based actuators to SMA foil- and film-based microactuators down to novel SMA nanoactuators. Key processing
technologies for fabrication of functional SMA micro- and nanodevices are presented and selected demonstrators
are discussed. Potential applications and the transfer to commercial products are highlighted.

Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Universität Karlsruhe (TH) – Interfakultative Einrichtungen (Interfakultative Einrichtungen)
Karlsruhe School of Optics & Photonics (KSOP)
Publikationstyp Proceedingsbeitrag
Publikationsjahr 2018
Sprache Englisch
Identifikator ISBN: 978-3-8007-4675-0
KITopen-ID: 1000093375
HGF-Programm 43.22.01 (POF III, LK 01) Functionality by Design
Erschienen in ACTUATOR 18 : 16th International Conference on New Actuators : 25-27 June 2018, Bremen, Germany : conference proceedings. Ed.: Hubert Borgmann
Veranstaltung 16th International Conference on New Actuators (2018), Bremen, Deutschland, 25.06.2018 – 27.06.2018
Verlag VDE Verlag
Seiten 366-374
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