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In-Situ Measurements in Microscale Gas Flows—Conventional Sensors or Something Else?

Brandner, Juergen J.

Abstract:
Within the last few decades miniaturization has a driving force in almost all areas of technology, leading to a tremendous intensification of systems and processes. Information technology provides now data density several orders of magnitude higher than a few years ago, and the smartphone technology includes, as well the simple ability to communicate with others, features like internet, video and music streaming, but also implementation of the global positioning system, environment sensors or measurement systems for individual health. So-called wearables are everywhere, from the physio-parameter sensing wrist smart watch up to the measurement of heart rates by underwear. This trend holds also for gas flow applications, where complex flow arrangements and measurement systems formerly designed for a macro scale have been transferred into miniaturized versions. Thus, those systems took advantage of the increased surface to volume ratio as well as of the improved heat and mass transfer behavior of miniaturized equipment. In accordance, disadvantages like gas flow mal-distribution on parallelized mini- or micro tubes or channels as well as increased pressure losses due to the minimized hydraulic diameters and an increased roughness-to-dimension ratio have to be taken into account. ... mehr

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Verlagsausgabe §
DOI: 10.5445/IR/1000094400
Veröffentlicht am 10.05.2019
Originalveröffentlichung
DOI: 10.3390/mi10050292
Coverbild
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2019
Sprache Englisch
Identifikator ISSN: 2072-666X
KITopen-ID: 1000094400
HGF-Programm 43.22.01 (POF III, LK 01)
Erschienen in Micromachines
Band 10
Heft 5
Seiten Article: 292
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Vorab online veröffentlicht am 29.04.2019
Schlagworte miniaturization; gas flows in micro scale; measurement and control; integrated micro sensors; advanced measurement technologies
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