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Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

Toto, Sofia; Nicolay, Pascal; Morini, Gian Luca; Rapp, Michael; Korvink, Jan G.; Brandner, Juergen J.

Abstract:
Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Surface Acoustic Waves, and it extends the vacuum sensed range to between 10−4 Pa and 105 Pa all along a complete wireless operation. A thermal analysis was performed based on gas kinetic theory, aiming to optimize the thermal conductivity and the Knudsen regime of the device. Theoretical analysis and simulation allowed designing the structure of the sensor and its dimensions to ensure the highest sensitivity through the whole sensing range and to build a model that simulates the behavior of the sensor under vacuum. A completely new design and a model simulating the behavior of the sensor from high vacuum to atmospheric pressure were established.

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Verlagsausgabe §
DOI: 10.5445/IR/1000095372
Veröffentlicht am 04.06.2019
Coverbild
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Jahr 2019
Sprache Englisch
Identifikator ISSN: 1424-8220
KITopen-ID: 1000095372
HGF-Programm 43.22.01 (POF III, LK 01)
Erschienen in Sensors
Band 19
Heft 10
Seiten 2421-2437
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Vorab online veröffentlicht am 27.05.2019
Schlagworte vacuum sensor; Pirani; surface acoustic waves; wireless sensors
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