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An Overview of Return-Path Ellipsometry

Chen, Chia-Wei

Abstract (englisch):

Ellipsometry is an optical method used for characterizing materials and thin films. The principle is based on the polarization change at a sample due to the reflection or transmission at boundaries. By the measurement of the amplitude ratio Ψ and the phase difference Δ, the complex refractive index can be obtained. Ellipsometers can be used in various industries, e.g., semiconductor, chemistry, and display industry. The typical applications are quality control of film growth and defect inspection. In the configuration of return-path ellipsometry (RPE), the
light beam is reflected twice from the sample. Thus, RPE has a higher sensitivity to the optical properties of samples. Some configurations of RPE have high tilt tolerance which is an important requirement for inline measurement. This report gives an introduction to the principle of ellipsometry and an overview of four different types of RPE.

Verlagsausgabe §
DOI: 10.5445/IR/1000097081
Veröffentlicht am 02.08.2019
Cover der Publikation
Zugehörige Institution(en) am KIT Fakultät für Informatik – Institut für Anthropomatik (IFA)
Publikationstyp Proceedingsbeitrag
Publikationsjahr 2019
Sprache Englisch
Identifikator ISBN: 978-3-7315-0936-3
ISSN: 1863-6489
KITopen-ID: 1000097081
Erschienen in Proceedings of the 2018 Joint Workshop of Fraunhofer IOSB and Institute for Anthropomatics, Vision and Fusion Laboratory. Ed.: J. Beyerer, M. Taphanel
Verlag KIT Scientific Publishing
Seiten 1-10
Serie Karlsruher Schriften zur Anthropomatik / Lehrstuhl für Interaktive Echtzeitsysteme, Karlsruher Institut für Technologie ; Fraunhofer-Inst. für Optronik, Systemtechnik und Bildauswertung IOSB Karlsruhe ; 40
Bemerkung zur Veröffentlichung Technical Report IES-2018-09
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