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CMOS-compatible, Flexible, Intracortical Neural Probes

Barz, Falk; Trouillet, Vanessa; Paul, Olliver; Ruther, Patrick

Flexible intractorical neural probes elicit a lower foreign body response when compared to rigid implants. However, by incorporating complementary metal-oxide-semiconductor (CMOS) circuitry, silicon-based neural probes can offer an im-proved scalability and more functionalities than any other cur-rently available technology. Objective: Our goal is the development of a novel neural probe that combines flexibility with the function-alities of active CMOS-based probes. Methods: We interface CMOS-based probe tips of only a few millimeters in length with flexible polyimide cables, which enable the complete implantation of the tips into brain tissue. The multilayer platinum metallization of the cables is patterned using a novel combination of ion beam and plasma etching. Implantation of the flexible probes is verified in brain models using stiff insertion shuttles. Result: We assembled neural probes from passive and active tips as short as 1.5 mm and less than 180 μm in width. Active probes feature electrode arrays with 72 recording sites and multiplexing to 16 parallel output lines. We reliably patterned cables with signal lines of 2 μm in width and 3 μm in spacing. ... mehr

DOI: 10.1109/TBME.2019.2936740
Zitationen: 1
Zitationen: 4
Zugehörige Institution(en) am KIT Institut für Angewandte Materialien - Energiespeichersysteme (IAM-ESS)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 05.2020
Sprache Englisch
Identifikator ISSN: 0018-9294, 1558-2531
KITopen-ID: 1000097761
Erschienen in IEEE transactions on biomedical engineering
Verlag Institute of Electrical and Electronics Engineers (IEEE)
Band 67
Heft 5
Seiten 1366-1376
Vorab online veröffentlicht am 21.08.2019
Schlagwörter KNMF, XPS
Nachgewiesen in Web of Science
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