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Super-Resolution Scanning Transmission X-Ray Imaging Using Single Biconcave Parabolic Refractive Lens Array

Mamyrbayev, T. 1; Ikematsu, K. 1; Meyer, P. 1; Ershov, A. 2; Momose, A.; Mohr, J. 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)
2 Institut für Photonenforschung und Synchrotronstrahlung (IPS), Karlsruher Institut für Technologie (KIT)


A new super resolution imaging technique which potentially enables sub-µm spatial resolution, using a detector of pixels much larger than the spatial resolution, is proposed. The method utilizes sample scanning through a large number of identical X-ray microprobes periodically spaced (the period corresponds to a multiple of the pixel size), which reduces drastically the scanning time. The information about the sample illuminated by the microprobes is stored by large detector pixels. Using these data and sample position information, a super-resolution image reconstruction is performed. With a one-dimensional (1D) high aspect ratio nickel single lens array designed for theoretically expected sub-µm microprobes at 17 keV and fabricated by deep X-ray lithography and electroforming technique, 2 µm X-ray microprobes with a period of 10 µm were achieved. We performed a first experiment at KARA synchrotron facility, and it was demonstrated that the smallest structure of a test pattern with a size of 1.5 µm could be easily resolved by using images generated from a detector having a pixel size of 10.4 µm. This new approach has a great potential for providing a new microscopic imaging modality with a large field of view and short scan time.

Verlagsausgabe §
DOI: 10.5445/IR/1000098857
Veröffentlicht am 11.10.2019
DOI: 10.1038/s41598-019-50869-8
Zitationen: 7
Web of Science
Zitationen: 6
Zitationen: 9
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Institut für Photonenforschung und Synchrotronstrahlung (IPS)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 12.2019
Sprache Englisch
Identifikator ISSN: 2045-2322
KITopen-ID: 1000098857
HGF-Programm 43.23.02 (POF III, LK 01) X-Ray Optics
Erschienen in Scientific reports
Verlag Nature Research
Band 9
Heft 1
Seiten Article: 14366
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Vorab online veröffentlicht am 07.10.2019
Schlagwörter Proposal 2017-019-020309: ERATO quantum-beam phase imaging project
Nachgewiesen in Web of Science
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