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Fabrication of α-FeSi2 nanowhiskers and nanoblades via electron beam physical vapor deposition

Huang, Wenting; Srot, Vesna; Wagner, Julia; Richter, Gunther

Abstract:
Iron disilicide nanowhiskers and nanoblades are synthesized by depositing Fe onto Si(100) substrates at about 900 degrees C via electron beam physical vapor deposition. The nanostructures are determined as single crystalline alpha-FeSi2 with tetragonal lattice. The nanostructures are stable with prolong exposure under ambient condition, and no transformation towards beta-FeSi2 is detected after 2 h annealing at 500 degrees C and 800 degrees C under high vacuum condition (10(-6) mbar). The growth directions of the whiskers are found as either [001] or [100]. However, in the blades we observe grow only in [100] crystallographic direction. Changing cross-sectional shape of the alpha-FeSi2 whiskers from octagon at the root to rectangle at the upper part is observed and believed to be a result of the thermodynamic and kinetic anisotropy. SiO2 layer formed on the surface of the structures because of its lower surface energy compared to all iron oxides. By this a passivation, which prevents further oxidization, of the nanowhiskers is achieved. The alpha-FeSi2 whiskers form by root growth. (C) 2019 The Authors. Published by Elsevier Ltd.

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Verlagsausgabe §
DOI: 10.5445/IR/1000099208
Veröffentlicht am 22.10.2019
Originalveröffentlichung
DOI: 10.1016/j.matdes.2019.108098
Scopus
Zitationen: 1
Web of Science
Zitationen: 1
Dimensions
Zitationen: 2
Cover der Publikation
Zugehörige Institution(en) am KIT Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 11.2019
Sprache Englisch
Identifikator ISSN: 0264-1275
KITopen-ID: 1000099208
Erschienen in Materials and design
Verlag Elsevier
Band 182
Seiten Article no: 108098
Schlagwörter Electron beam evaporation; alpha-FeSi2; Whisker; Transmission electron microscopy; Atom probe tomography; Physical vapor deposition
Nachgewiesen in Web of Science
Dimensions
Scopus
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