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3D-Printed Scanning-Probe Microscopes with Integrated Optical Actuation and Read-Out

Dietrich, Philipp-Immanuel 1,2; Göring, Gerald 3; Trappen, Mareike 1,2; Blaicher, Matthias 1,2; Freude, Wolfgang 2; Schimmel, Thomas 3; Hölscher, Hendrik 1; Koos, Christian 1,2
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)
2 Institut für Photonik und Quantenelektronik (IPQ), Karlsruher Institut für Technologie (KIT)
3 Institut für Angewandte Physik (APH), Karlsruher Institut für Technologie (KIT)

Scanning‐probe microscopy (SPM) is the method of choice for high‐resolution imaging of surfaces in science and industry. However, SPM systems are still considered as rather complex and costly scientific instruments, realized by delicate combinations of microscopic cantilevers, nanoscopic tips, and macroscopic read‐out units that require high‐precision alignment prior to use. This study introduces a concept of ultra‐compact SPM engines that combine cantilevers, tips, and a wide variety of actuator and read‐out elements into one single monolithic structure. The devices are fabricated by multiphoton laser lithography as it is a particularly flexible and accurate additive nanofabrication technique. The resulting SPM engines are operated by optical actuation and read‐out without manual alignment of individual components. The viability of the concept is demonstrated in a series of experiments that range from atomic‐force microscopy engines offering atomic step height resolution, their operation in fluids, and to 3D printed scanning near‐field optical microscopy. The presented approach is amenable to wafer‐scale mass fabrication of SPM arrays and capable to unlock a wide range of novel applications that are inaccessible by current approaches to build SPMs.

Verlagsausgabe §
DOI: 10.5445/IR/1000100595
Veröffentlicht am 24.02.2020
DOI: 10.1002/smll.201904695
Zitationen: 9
Zitationen: 10
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Angewandte Physik (APH)
Institut für Mikrostrukturtechnik (IMT)
Institut für Photonik und Quantenelektronik (IPQ)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2020
Sprache Englisch
Identifikator ISSN: 1613-6810
KITopen-ID: 1000100595
HGF-Programm 43.22.03 (POF III, LK 01) Printed Materials and Systems
Erschienen in Small
Verlag John Wiley and Sons
Band 16
Heft 2
Seiten Article no: 1904695
Vorab online veröffentlicht am 05.12.2019
Nachgewiesen in Web of Science
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