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Bulk and Surface Acoustic Wave Sensor Arrays for Multi-Analyte Detection: A Review

Länge, Kerstin 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)


Bulk acoustic wave (BAW) and surface acoustic wave (SAW) sensor devices have successfully been used in a wide variety of gas sensing, liquid sensing, and biosensing applications. Devices include BAW sensors using thickness shear modes and SAW sensors using Rayleigh waves or horizontally polarized shear waves (HPSWs). Analyte specificity and selectivity of the sensors are determined by the sensor coatings. If a group of analytes is to be detected or if only selective coatings (i.e., coatings responding to more than one analyte) are available, the use of multi-sensor arrays is advantageous, as the evaluation of the resulting signal patterns allows qualitative and quantitative characterization of the sample. Virtual sensor arrays utilize only one sensor but combine itwith enhanced signal evaluation methods or preceding sample separation, which results in similar results as obtained with multi-sensor arrays. Both array types have shown to be promising with regard to system integration and low costs. This review discusses principles and design considerations for acoustic multi-sensor and virtual sensor arrays and outlines the use of these arrays in multi-analyte detection applications, focusing mainly on developments of the past decade.

Verlagsausgabe §
DOI: 10.5445/IR/1000104512
Veröffentlicht am 03.01.2020
DOI: 10.3390/s19245382
Zitationen: 78
Zitationen: 83
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2019
Sprache Englisch
Identifikator ISSN: 1424-8220
KITopen-ID: 1000104512
HGF-Programm 47.02.07 (POF III, LK 01) Zellpopul.auf Biofunk.Oberflächen IMT
Erschienen in Sensors
Verlag MDPI
Band 19
Heft 24
Seiten Article no: 5382
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Gefördert vom Ministerium für Wissenschaft, Forschung und Kunst Baden-Württemberg (MWK) im Rahmen des Open-Access-Förderprogramms "BW BigDIWA"
Vorab online veröffentlicht am 06.12.2019
Schlagwörter bulk acoustic wave, surface acoustic wave, quartz crystal microbalance, film bulk acoustic, resonator, sensor array, chemical sensor, biosensor, electronic nose, electronic tongue
Nachgewiesen in Web of Science
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