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Quantitative analysis of time-resolved RHEED during growth of vertical nanowires

Jakob, Julian; Schroth, Philipp; Feigl, Ludwig; Hauck, Daniel; Pietsch, Ullrich; Baumbach, Tilo

We present an approach for quantitative evaluation of time-resolved reflection high-energy electron diffraction (RHEED) intensity patterns measured during the growth of vertical, free-standing nanowires (NWs). The approach considers shadowing due to attenuation by absorption and extinction within the individual nanowires and estimates the time dependence of its influence on the RHEED signal of the nanowire ensemble as a function of instrumental RHEED parameters and the growth dynamics averaged over the nanowire ensemble. The developed RHEED simulation model takes into account the nanowire structure evolution related to essential growth aspects, such as axial growth, radial growth with tapering and facet growth, as well as so-called parasitic intergrowth on the substrate. It also considers the influence of the NW density, which turns out to be a sensitive parameter for the time-dependent interpretation of the intensity patterns. Finally, the application potential is demonstrated by evaluating experimental data obtained during molecular beam epitaxy (MBE) of self-catalysed GaAs nanowires. We demonstrate, how electron shadowing enables a time-resolved analysis of the crystal structure evolution at the top part of the growing NWs. ... mehr

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Verlagsausgabe §
DOI: 10.5445/IR/1000117393
Veröffentlicht am 27.02.2020
DOI: 10.1039/c9nr09621c
Zitationen: 3
Zitationen: 3
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Photonenforschung und Synchrotronstrahlung (IPS)
Laboratorium für Applikationen der Synchrotronstrahlung (LAS)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2020
Sprache Englisch
Identifikator ISSN: 2040-3364, 2040-3372
KITopen-ID: 1000117393
HGF-Programm 56.03.20 (POF III, LK 01) Nanoscience a.Material f.Inform.Technol.
Erschienen in Nanoscale
Verlag Royal Society of Chemistry (RSC)
Band 12
Heft 9
Seiten 5471-5482
Vorab online veröffentlicht am 17.02.2020
Nachgewiesen in Web of Science
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