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Flexible Bioelectronic Devices Based on Micropatterned Monolithic Carbon Fiber Mats

Vomero, Maria; Gueli, Calogero; Zucchini, Elena; Fadiga, Luciano; Erhardt, Johannes B.; Sharma, Swati; Stieglitz, Thomas

Polymer‐derived carbon can serve as an electrode material in multimodal neural stimulation, recording, and neurotransmitter sensing platforms. The primary challenge in its applicability in implantable, flexible neural devices is its characteristic mechanical hardness that renders it difficult to fabricate the entire device using only carbon. A microfabrication technique is introduced for patterning flexible, cloth‐like, polymer‐derived carbon fiber (CF) mats embedded in polyimide (PI), via selective reactive ion etching. This scalable, monolithic manufacturing method eliminates any joints or metal interconnects and creates electrocorticography electrode arrays based on a single CF mat. The batch‐fabricated CF/PI composite structures, with critical dimension of 12.5 µm, are tested for their mechanical, electrical, and electrochemical stability, as well as to chemicals that mimic acute postsurgery inflammatory reactions. Their recording performance is validated in rat models. Reported CF patterning process can benefit various carbon microdevices that are expected to feature flexibility, material stability, and biocompatibility.

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Verlagsausgabe §
DOI: 10.5445/IR/1000117482
Veröffentlicht am 02.03.2020
DOI: 10.1002/admt.201900713
Zitationen: 5
Web of Science
Zitationen: 5
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 02.2020
Sprache Englisch
Identifikator ISSN: 2365-709X, 2365-709X
KITopen-ID: 1000117482
HGF-Programm 43.21.03 (POF III, LK 01) Carbon Nanosystems
Erschienen in Advanced materials technologies
Verlag Wiley
Band 5
Heft 2
Seiten 1900713
Vorab online veröffentlicht am 11.12.2019
Nachgewiesen in Scopus
Web of Science
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