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Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy

Mamyrbayev, Talgat; Opolka, Alexander; Ershov, Alexey; Gutekunst, Josephine; Meyer, Pascal; Ikematsu, Katsumasa; Momose, Atsushi; Last, Arndt

Abstract:
A two-dimensional array of compound refractive lenses (2D array of CRLs) designed for hard X-ray imaging with a 3.5 mm$^{2}$ large field of view is presented. The array of CRLs consists of 2D polymer biconcave parabolic 34 × 34 multi-lenses fabricated via deep X-ray lithography. The developed refractive multi-lens array was applied for sub-pixel resolution scanning transmission X–ray microscopy; a raster scan with only 55 × 55 steps provides a 3.5 megapixel image. The optical element was experimentally characterized at the Diamond Light Source at 34 keV. An array of point foci with a 55 µm period and an average size of ca. 2.1 µm × 3.6 µm was achieved. In comparison with the conventional scanning transmission microscopy using one CRL, sub-pixel resolution scanning transmission hard X-ray microscopy enables a large field of view and short scanning time while keeping the high spatial resolution.

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Verlagsausgabe §
DOI: 10.5445/IR/1000120340
Veröffentlicht am 22.06.2020
Originalveröffentlichung
DOI: 10.3390/app10124132
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Institut für Photonenforschung und Synchrotronstrahlung (IPS)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2020
Sprache Englisch
Identifikator ISSN: 2076-3417
KITopen-ID: 1000120340
HGF-Programm 43.23.02 (POF III, LK 01) X-Ray Optics
Erschienen in Applied Sciences
Verlag MDPI
Band 10
Heft 12
Seiten Art.Nr.: 4132
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Vorab online veröffentlicht am 16.06.2020
Schlagwörter 2017-018-019249 (EBL, XRL), 2017-019-020309 (DLW, EBL, XRL)
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