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Quantification of the thickness of TEM samples by low-energy scanning transmission electron microscopy

Hugenschmidt, Milena ORCID iD icon; Müller, Erich ORCID iD icon; Gerthsen, Dagmar

Abstract (englisch):

Precise knowledge of the local sample thickness is often required for quantitative scanning (transmission) electron microscopy (STEM). The local sample thickness can be determined by the comparison of measured intensities from high-angle annular dark-field (HAADF)-STEM at low energies (<30 keV) with Monte-Carlo simulations. However, a suitable choice of the scattering cross-section (CS) used in the simulations is necessary to gain reliable thickness results.
In this work, simulations using different CS, including the Screened Rutherford CS and different Mott CSs, were performed. The results were then compared with measurements on samples with known thickness and composition, for which an SEM equipped with a STEM detector was used. In most cases, the Screened Rutherford CS describes the experiment better than other CSs.

Volltext §
DOI: 10.5445/IR/1000123970
Veröffentlicht am 25.09.2020
Cover der Publikation
Zugehörige Institution(en) am KIT Laboratorium für Elektronenmikroskopie (LEM)
Universität Karlsruhe (TH) – Zentrale Einrichtungen (Zentrale Einrichtungen)
Publikationstyp Poster
Publikationsdatum 08.09.2015
Sprache Englisch
Identifikator KITopen-ID: 1000123970
Veranstaltung Microscopy Conference (MC 2015 2015), Göttingen, Deutschland, 06.09.2015 – 11.09.2015
Schlagwörter Monte-Carlo Simulations, sample thickness, STEM-in-SEM,Low-energy STEM, LVSTEM, Scanning transmission electron microscopy, STEM-in-SEM, TSEM.
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