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Quantification of the carbon bonding state in amorphous carbon materials: A comparison between EELS and NEXAFS measurements

Mangolini, Filippo; Li, Zixuan; Marcus, Matthew A.; Schneider, Reinhard; Dienwiebel, Martin

The quantitative determination of the carbon hybridization is critical for establishing processing-structure-properties relationships for carbon-based materials, including amorphous carbon coatings. While several techniques have been employed to characterize the amount of sp$^{2}$ and sp$^{3}$ carbon in these materials, direct comparisons between analytical results are limited. Here, we compare near edge X-rayabsorptionfine structure (NEXAFS) spectra of a silicon- and oxygen-containing hydrogenated amorphouscarbon (a-C:H:Si:O) coating acquired in synchrotron-based scanning transmission X-ray microscopy (STXM) mode with electron energy loss spectra (EELS) obtained from the same a-C:H:Si:O lamella. While the fractions of sp$^{2}$ carbon computed from STXM and EELS spectra are in close agreement, the comparison of NEXAFS spectra acquired in STXM mode with NEXAFS spectra collected in partial electron yield mode on a flat a-C:H:Si:O surface indicated that the destructive preparation of thin lamellae for STXM analyses induces variations in the structure of a-C:H:Si:O, namely the breakage of carbon-siliconand carbon-hydrogen bonds, a change in ordering of sp$^{2}$-bonded carbon, and an increase in the sp$^{2}$ carbon fraction. ... mehr

DOI: 10.1016/j.carbon.2020.11.021
Zugehörige Institution(en) am KIT Institut für Angewandte Materialien - Computational Materials Science (IAM-CMS)
Laboratorium für Elektronenmikroskopie (LEM)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 03.2021
Sprache Englisch
Identifikator ISSN: 0008-6223
KITopen-ID: 1000126708
Erschienen in Carbon
Band 173
Seiten 557–564
Nachgewiesen in Scopus
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