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Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities

Heupel, Julia; Pallmann, Maximilian ORCID iD icon 1; Körber, Jonathan 1; Merz, Rolf; Kopnarski, Michael; Stöhr, Rainer; Reithmaier, Johann Peter; Hunger, David ORCID iD icon 2; Popov, Cyril
1 Karlsruher Institut für Technologie (KIT)
2 Institut für QuantenMaterialien und Technologien (IQMT), Karlsruher Institut für Technologie (KIT)

Abstract (englisch):

The development of quantum technologies is one of the big challenges in modern research. Acrucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of
alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of
an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membranethickness. ... mehr

Verlagsausgabe §
DOI: 10.5445/IR/1000127779
Veröffentlicht am 15.12.2020
DOI: 10.3390/mi11121080
Zitationen: 9
Zitationen: 9
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für QuantenMaterialien und Technologien (IQMT)
Physikalisches Institut (PHI)
Publikationstyp Zeitschriftenaufsatz
Publikationsdatum 05.12.2020
Sprache Englisch
Identifikator ISSN: 2072-666X
KITopen-ID: 1000127779
HGF-Programm 43.21.04 (POF III, LK 01) Molecular Engineering
Erschienen in Micromachines
Verlag MDPI
Band 11
Heft 12
Seiten Art.-Nr.: 1080
Projektinformation Q.Link.X (BMBF, BUND HTS, 16KIS0879)
Bemerkung zur Veröffentlichung This article belongs to the Special Issue Diamond: Materials, Devices and Applications
Vorab online veröffentlicht am 04.12.2020
Nachgewiesen in Scopus
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