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Characterization of a Wireless Vacuum Sensor Prototype Based on the SAW-Pirani Principle

Toto, Sofia 1; Jouda, Mazin 1; Korvink, Jan G. 1; Sundarayyan, Suparna 1; Voigt, Achim 1; Davoodi, Hossein 1; Brandner, Juergen J. 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)


A prototype of a wireless vacuum microsensor combining the Pirani principle and surface acoustic waves (SAW) with extended range and sensitivity was designed, modelled, manufactured and characterised under different conditions. The main components of the prototype are a sensing SAW chip, a heating coil and an interrogation antenna. All the components were assembled on a 15 mm × 11 mm × 3 mm printed circuit board (PCB). The behaviour of the PCB was characterised under ambient conditions and in vacuum. The quality of the SAW interrogation signal, the frequency shift and the received current of the coil were measured for different configurations. Pressures between 0.9 and 100,000 Pa were detected with sensitivities between 2.8 GHz/Pa at 0.9 Pa and 1 Hz/Pa close to atmospheric pressure. This experiment allowed us to determine the optimal operating conditions of the sensor and the integration conditions inside a vacuum chamber in addition to obtaining a pressure-dependent signal.

Verlagsausgabe §
DOI: 10.5445/IR/1000127967
Veröffentlicht am 22.12.2020
DOI: 10.3390/pr8121685
Zitationen: 2
Web of Science
Zitationen: 2
Zitationen: 2
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2020
Sprache Englisch
Identifikator ISSN: 2227-9717
KITopen-ID: 1000127967
HGF-Programm 43.22.01 (POF III, LK 01) Functionality by Design
Erschienen in Processes
Verlag MDPI
Band 8
Heft 12
Seiten Art.-Nr.: 1685
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Vorab online veröffentlicht am 21.12.2020
Schlagwörter SAW, Pirani, compact, wireless, vacuum, sensing
Nachgewiesen in Dimensions
Web of Science
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