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3D nanometrology of transparent objects by phase calibration of a basic bright-field microscope for multiple illumination apertures

Migliozzi, D.; Zhao, B.; Gijs, M. A. M.

Abstract:
Optical retrieval of the structure of transparent objects at the nanoscale requires adapted techniques capable of probing their interaction with light. Here, we considered a method based on calibration of the defocusing with partially coherent illumination and explored its phase retrieval capability over a wide range of illumination angles. We imaged: (1) commercial dielectric nanospheres to assess the phase calibration when measured along the optical axis, (2) custom-made nano-steps micropatterned in a glass substrate to assess the phase calibration when measured along the transversal axis, and (3) human cancer cells deposited on a glass substrate to assess the results of the calibration on complex transparent 3-dimensional samples. We first verified the model prediction in the spatial frequency domain and subsequently obtained a consistent and linear phase-calibration for illumination numerical apertures ranging from 0.1 to 0.5. Finally, we studied the dependence of the phase retrieval of a complex nanostructured object on the illumination aperture.

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Verlagsausgabe §
DOI: 10.5445/IR/1000127997
Veröffentlicht am 28.12.2020
Cover der Publikation
Zugehörige Institution(en) am KIT Karlsruher Institut für Technologie (KIT)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 09.2020
Sprache Englisch
Identifikator ISSN: 1094-4087
KITopen-ID: 1000127997
Erschienen in Optics express
Verlag Optical Society of America (OSA)
Band 28
Heft 20
Seiten 28882-28895
Vorab online veröffentlicht am 14.09.2020
Nachgewiesen in Scopus
Web of Science
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