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The effects of pattern screen surface deformation on deflectometric measurements - A simulation study

Allgeier, Stephan ORCID iD icon; Gengenbach, Ulrich; Köhler, Bernd; Reichert, Klaus-Martin; Hagenmeyer, Veit

Abstract (englisch):

Phase-measuring deflectometry (PMD) is an optical inspection technique for full-field topography measurements of reflective sample surfaces. The measurement principle relies on the analysis of specific patterns, reflected at the sample surface. Evaluation algorithms often model the respective pattern screen as a planar light source. However, the 32'' pattern screen in our inspection setup exhibits a central bulge of its surface of about 2–3 mm. This paper presents a simulation framework for PMD to evaluate the effects of a deformed screen surface. The idea is to simulate image data acquired with screen surface deformations and to examine the effects on the PMD evaluation results. The simulated setup consists of a 32'' pattern screen with an adjustable central bulge height of 0–3 mm and two cameras with a field of view (FOV) of approximately 225 mm by 172 mm on the sample surface. A first experiment examines the reconstruction errors for a planar sample surface if the reconstruction algorithm uses perfect calibration data (i.e. the same parameters used for the simulated image acquisition). The reconstructed surfaces exhibit a tilt with a maximum height difference of 174 μm across the FOV. ... mehr

Verlagsausgabe §
DOI: 10.5445/IR/1000135418
Veröffentlicht am 30.07.2021
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Automation und angewandte Informatik (IAI)
Publikationstyp Proceedingsbeitrag
Publikationsdatum 20.06.2021
Sprache Englisch
Identifikator ISBN: 978-1-5106-4408-3
ISSN: 0277-786X
KITopen-ID: 1000135418
HGF-Programm 43.31.02 (POF IV, LK 01) Devices and Applications
Erschienen in Automated Visual Inspection and Machine Vision IV: SPIE Optical Metrology, 21-26 June 2021. Ed.: J. Beyerer
Veranstaltung SPIE Optical Metrology (2021), Online, 21.06.2021 – 25.06.2021
Verlag Society of Photo-optical Instrumentation Engineers (SPIE)
Seiten Art.-Nr.: 1178708
Serie Proceedings of SPIE ; 11787
Nachgewiesen in Dimensions
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