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Fast Determination of the Thickness of Electron-Transparent Specimens using Quantitative STEM-in-SEM and Monte-Carlo Simulations

Adrion, Katharina; Hugenschmidt, Milena ORCID iD icon; Müller, Erich; Gerthsen, Dagmar

Abstract (englisch):

Accurate values for the thickness of electron-transparent specimens in electron microscopy are of general interest, e.g. as a parameter for quantitative simulations and calculations in the field of transmission electron microscopy (TEM). Several thickness-determination techniques exist, e.g. based on plasmon losses in electron energy loss spectra, convergent-beam electron diffraction, or exploitation of thickness contours in images acquired under two-beam diffraction conditions. However, the accuracy, precision, and time consumption differs significantly and often yields thickness values only for a small sample region.
We will show in this work that scanning transmission electron microscopy (STEM) in a scanning electron microscope (STEM-in-SEM) is well suited for thickness determination with rather satisfying accuracy (error within a few percent). This technique has been further elaborated by us after previous initial work. We will give an in-depth instruction and discussion of the technique so that users can avoid pitfalls.

Volltext §
DOI: 10.5445/IR/1000135526
Veröffentlicht am 20.07.2021
Cover der Publikation
Zugehörige Institution(en) am KIT 3D Matter Made to Order (3DMM2O)
Laboratorium für Elektronenmikroskopie (LEM)
Universität Karlsruhe (TH) – Zentrale Einrichtungen (Zentrale Einrichtungen)
Publikationstyp Poster
Publikationsdatum 26.08.2021
Sprache Englisch
Identifikator KITopen-ID: 1000135526
Veranstaltung Microscopy Conference (MC 2021), Online, 22.08.2021 – 26.08.2021
Schlagwörter Electron microscopy; STEM-in-SEM; Thickness Determination; Carbon Contamination; Monte-Carlo-Simulations
KIT – Die Forschungsuniversität in der Helmholtz-Gemeinschaft
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