Frequency division multiplex-based light spectroscopy

Light spectrometers are highly versatile state-of-the-art measurement devices. However, using these systems, e.g., in semiconductor device characterization, creates challenging obstacles with respect to measurement time. We present a new, flexible and accurate approach to either characterize optical properties of arbitrary photosensitive devices or examine the spectral components of light reliably. Using a spatial light modulator (SLM) in combination with frequency division multiplexing methods, it is possible to significantly improve signal-to-noise ratios and decrease measurement times. Moreover, the use of SLM ensures a greater reliability of the setup because conventional moving parts are replaced. The feasibility and experimental setup are described in detail. The setup has been validated for various applications by comparative measurements.