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Quantifying the performance of a hybrid pixel detector with GaAs:Cr sensor for transmission electron microscopy

Paton, Kirsty A.; Veale, Matthew C.; Mu, Xiaoke 1; Allen, Christopher S.; Maneuski, Dzmitry; Kübel, Christian ORCID iD icon 1; O’Shea, Val; Kirkland, Angus I.; McGrouther, Damien
1 Karlsruhe Nano Micro Facility (KNMF), Karlsruher Institut für Technologie (KIT)


Hybrid pixel detectors (HPDs) have been shown to be highly effective for diffraction-based and time-resolved studies in transmission electron microscopy, but their performance is limited by the fact that high-energy electrons scatter over long distances in their thick Si sensors. An advantage of HPDs compared to monolithic active pixel sensors is that their sensors do not need to be fabricated from Si. We have compared the performance of the Medipix3 HPD with a Si sensor and a GaAs:Cr sensor using primary electrons in the energy range of 60–300 keV. We describe the measurement and calculation of the detectors’ modulation transfer function (MTF) and detective quantum efficiency (DQE), which show that the performance of the GaAs:Cr device is markedly superior to that of the Si device for high-energy electrons.

Verlagsausgabe §
DOI: 10.5445/IR/1000138018
Veröffentlicht am 27.09.2021
DOI: 10.1016/j.ultramic.2021.113298
Zitationen: 11
Web of Science
Zitationen: 10
Zitationen: 15
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Nanotechnologie (INT)
Karlsruhe Nano Micro Facility (KNMF)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 08.2021
Sprache Englisch
Identifikator ISSN: 0304-3991
KITopen-ID: 1000138018
HGF-Programm 43.35.03 (POF IV, LK 01) Structural and Functional Behavior of Solid State Systems
Erschienen in Ultramicroscopy
Verlag Elsevier
Band 227
Seiten Art. Nr.: 113298
Schlagwörter Direct electron detector, DQE, MTF, Hybrid pixel detector, Transmission electron microscopy
Nachgewiesen in Dimensions
Web of Science
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