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On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

Poletkin, Kirill 1
1 Institut für Mikrostrukturtechnik (IMT), Karlsruher Institut für Technologie (KIT)


This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such a pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modeling were verified experimentally and agree well with measurements.

Verlagsausgabe §
DOI: 10.5445/IR/1000139534
Veröffentlicht am 02.11.2021
DOI: 10.3390/act10100256
Zitationen: 7
Web of Science
Zitationen: 7
Zitationen: 8
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Mikrostrukturtechnik (IMT)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2021
Sprache Englisch
Identifikator ISSN: 2076-0825
KITopen-ID: 1000139534
HGF-Programm 43.31.02 (POF IV, LK 01) Devices and Applications
Erschienen in Actuators
Verlag MDPI
Band 10
Heft 10
Seiten Article no: 256
Bemerkung zur Veröffentlichung Gefördert durch den KIT-Publikationsfonds
Vorab online veröffentlicht am 29.09.2021
Schlagwörter micro-actuators; micro-systems; micro-manipulators; levitation; mutual inductance; electrostatic pull-in; eddy current
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