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Design of NbN Based Kinetic Inductance Detectors for Polarimetric Plasma Diagnostics

Mazzocchi, Francesco ORCID iD icon 1; Driessen, Eduard; Shu, Shibo; Merker, Michael 2; Ilin, Konstantin 2; Siegel, Michael 2; Meier, Andreas 1; Strauß, Dirk 1; Scherer, Theo 1
1 Institut für Angewandte Materialien – Angewandte Werkstoffphysik (IAM-AWP), Karlsruher Institut für Technologie (KIT)
2 Institut für Mikro- und Nanoelektronische Systeme (IMS), Karlsruher Institut für Technologie (KIT)


In this article, we present the design of a custom kinetic inductance detector (KID) tailored for polarimetric diagnostics of magnetically confined fusion plasma. The detector is of the lumped elements KID kind and is based on a crossed 2 × 2 pixel design for polarization sensitivity. Simulations have been performed to tune device parameters like resonance frequency, cross-talking and coupling with the microstrip feed line, taking into consideration the requirements of the final instrument and the field of application. The devices have been designed for optimal absorption at 1.3 THz, the chosen probing frequency for the final instrument, and they resonate in a range from 0.8 to 1.1 GHz. The characterization of the thin niobium nitride film and the first S $_{21}$ parameter measurements performed on patterned thin films deposited on 330 μm high resistivity silicon substrates are also presented.

Postprint §
DOI: 10.5445/IR/1000140557
Veröffentlicht am 06.03.2023
DOI: 10.1109/TASC.2021.3102392
Web of Science
Zitationen: 3
Zitationen: 4
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Angewandte Materialien – Angewandte Werkstoffphysik (IAM-AWP)
Institut für Mikro- und Nanoelektronische Systeme (IMS)
Publikationstyp Zeitschriftenaufsatz
Publikationsmonat/-jahr 10.2021
Sprache Englisch
Identifikator ISSN: 1051-8223, 1558-2515, 2378-7074
KITopen-ID: 1000140557
HGF-Programm 31.13.06 (POF IV, LK 01) Plant Engineering
Erschienen in IEEE transactions on applied superconductivity
Verlag Institute of Electrical and Electronics Engineers (IEEE)
Band 31
Heft 7
Seiten Art.-Nr. 2400407
Vorab online veröffentlicht am 10.08.2021
Nachgewiesen in Dimensions
Web of Science
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